TheSilicon Carbide e koahetsoeng Letlapa la EpitaxialLeka Ho sebelisoa kaLisebelisoa tsa Epitaxial Furnacee entsoeng Chaena ke Vet Energy, e leng e mong oa bahlahisi le barekisi ba Chaena. RekaSilicon Carbide e koahetsoeng Letlapa la EpitaxialTerei e sebelisoang ChaenaLisebelisoa tsa Epitaxial Furnaceka theko e tlase ho tsoa femeng ea rona. Re na le mabitso a rona mme re boetse re tšehetsa bongata. Haeba u thahasella lihlahisoa tsa rona, re tla u fa theko e tlaase. Rea u amohela ho reka sehlahisoa sa theolelo se ncha ka ho fetisisa le sa boleng bo holimo ho tsoa ho rona.
Khamphani ea rona e fana ka lits'ebeletso tsa ts'ebetso ea ho roala SiC ka mokhoa oa CVD holim'a graphite, li-ceramics le lisebelisoa tse ling, e le hore likhase tse khethehileng tse nang le carbon le silicon li sebetsane le mocheso o phahameng ho fumana limolek'hule tsa SiC tse hloekileng, limolek'hule tse behiloeng holim'a thepa e koahetsoeng, ho etsa lera la tšireletso la SIC.
Lintlha tse ka sehloohong:
1. Ho hanyetsa mocheso o phahameng oa oxidation:
khanyetso ea oxidation e ntse e le ntle haholo ha mocheso o le holimo ho 1600 C.
2. Bohloeki bo phahameng: bo entsoeng ka ho kenngoa ha mouoane oa lik'hemik'hale tlas'a boemo bo phahameng ba mocheso oa chlorination.
3. Ho hanyetsa khoholeho ea mobu: boima bo phahameng, bokaholimo bo kopanetsoeng, likaroloana tse ntle.
4. Ho hanyetsa kutu: acid, alkali, letsoai le li-reagents tse phelang.
Litlhaloso tsa mantlha tsa Coating ea CVD-SIC:
SiC-CVD Properties | ||
Sebopeho sa Crystal | FCC mohato oa β | |
Botenya | g/cm³ | 3.21 |
Ho thatafala | Vickers thata | 2500 |
Boholo ba lijo-thollo | μm | 2~10 |
Bohloeki ba Lik'hemik'hale | % | 99.99995 |
Matla a Mocheso | J·kg-1·K-1 | 640 |
Sublimation Mocheso | ℃ | 2700 |
Felexural Matla | MPa (RT 4-point) | 415 |
Modulus e monyane | Gpa (4pt bend, 1300 ℃) | 430 |
Katoloso ea Thermal (CTE) | 10-6K-1 | 4.5 |
Thermal conductivity | (W/mK) | 300 |
Ke hobane'ng ha u ka khetha vet?
1) re na le tiiso e lekaneng ea setoko.
2) liphutheloana tsa setsebi li tiisa botšepehi ba sehlahisoa. Sehlahisoa se tla tlisoa ho uena ka mokhoa o sireletsehileng.
3) liteishene tse ling tsa thepa li etsa hore lihlahisoa li fetisetsoe ho uena.