silicon carbide ceramic coating heater

Vet-ChaenaSilicon Carbide CeramicCoating ke tšireletso e phahameng ea ts'ireletso e entsoeng ka thata ka ho fetisisa le e sa senyehengsilicon carbide (SiC)lintho tse bonahalang, tse fanang ka lik'hemik'hale tse ntle haholo tse thibelang kutu le botsitso ba mocheso o phahameng. Litšobotsi tsena ke tsa bohlokoa tlhahisong ea semiconductor, ka honaSilicon Carbide Ceramic Coatinge sebelisoa haholo likarolong tsa bohlokoa tsa lisebelisoa tsa tlhahiso ea semiconductor.

Karolo e ikhethileng ea Vet-ChinaSilicon Carbide CeramicHo roala ka tlhahiso ea semiconductor ke ka tsela e latelang:

Ntlafatsa ho tšoarella ha lisebelisoa:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating e fana ka tšireletso e ntle ea holim'a metsi bakeng sa lisebelisoa tsa tlhahiso ea semiconductor ka boima ba eona bo phahameng ka ho fetesisa le khanyetso ea ho roala. Haholo-holo libakeng tse phahameng tsa mocheso le tse senyang haholo, tse kang lik'hemik'hale tsa mouoane oa lik'hemik'hale (CVD) le plasma etching, ho roala ho ka thibela ka katleho hore thepa e ka senngoa ke khoholeho ea lik'hemik'hale kapa ho apara 'mele, kahoo e lelefatsa haholo bophelo ba tšebeletso. lisebelisoa le ho fokotsa nako ea ho theoha ho bakoang ke ho nkeloa sebaka khafetsa le ho lokisoa.

Ntlafatsa bohloeki ba ts'ebetso:Ts'ebetsong ea tlhahiso ea semiconductor, tšilafalo e nyane e ka baka bofokoli ba sehlahisoa. Lik'hemik'hale tsa lik'hemik'hale tsa Silicon Carbide Ceramic Coating li lumella hore li lule li tsitsitse tlas'a maemo a feteletseng, ho thibela thepa hore e se ke ea ntša likaroloana kapa litšila, kahoo e netefatsa bohloeki ba tikoloho ea ts'ebetso. Sena ke sa bohlokoa ka ho khetheha bakeng sa mehato ea tlhahiso e hlokang ho nepahala ho phahameng le bohloeki bo phahameng, joalo ka PECVD le ho kenngoa ha ion.

Ntlafatsa taolo ea mocheso:Ts'ebetsong ea semiconductor e phahameng ea mocheso, joalo ka ts'ebetso e potlakileng ea mocheso (RTP) le lits'ebetso tsa oxidation, conductivity e phahameng ea mocheso oa Silicon Carbide Ceramic Coating e nolofalletsa ho ajoa ha mocheso o tšoanang ka har'a lisebelisoa. Sena se thusa ho fokotsa khatello ea mocheso le deformation ea thepa e bakoang ke ho fetoha ha mocheso, ka tsela eo ho ntlafatsa ho nepahala ha tlhahiso ea lihlahisoa le ho tsitsisa.

Ts'ehetsa maemo a rarahaneng a ts'ebetso:Lits'ebetsong tse hlokang taolo e rarahaneng ea sepakapaka, joalo ka ICP etching le PSS etching process, botsitso le ho hanyetsa oxidation ea Silicon Carbide Ceramic Coating ho netefatsa hore lisebelisoa li boloka ts'ebetso e tsitsitseng ts'ebetsong ea nako e telele, ho fokotsa kotsi ea ho senyeha ha thepa kapa ho senyeha ha lisebelisoa ka lebaka la ts'ebetso e tsitsitseng. ho liphetoho tsa tikoloho.