CVD (Chemical Vapor Deposition) ke mokhoa o sebelisoang hangata ho lokisa liphahlo tsa silicon carbide.CVD silicon carbide coatingse na le litšobotsi tse ngata tse ikhethang tsa ts'ebetso. Sengoliloeng sena se tla hlahisa mokhoa oa ho lokisa oa CVD silicon carbide coating le litšobotsi tsa eona tsa ts'ebetso.
1. Mokhoa oa ho itokisa oaCVD silicon carbide coating
Mokhoa oa CVD o fetola li-precursors tsa gaseous hore e be liaparo tse tiileng tsa silicon carbide tlas'a maemo a phahameng a mocheso. Ho latela li-precursors tse fapaneng tsa gaseous, e ka aroloa ka karolo ea khase ea CVD le CVD ea mokelikeli.
1. CVD ea mohato oa mouoane
Vapor phase CVD e sebelisa li-precursors tsa gaseous, hangata metsoako ea organosilicon, ho fihlela kholo ea lifilimi tsa silicon carbide. Lik'hemik'hale tsa organosilicon tse sebelisoang ka tloaelo li kenyelletsa methylsilane, dimethylsilane, monosilane, joalo-joalo, tse etsang lifilimi tsa silicon carbide holim'a litšepe tsa tšepe ka ho tsamaisa li-precursors tsa gaseous ka likamoreng tsa karabelo e phahameng ea mocheso. Libaka tse phahameng tsa mocheso ka kamoreng ea karabelo hangata li hlahisoa ke ho futhumala ha induction kapa ho futhumatsa ho hanyetsang.
2. Mokelikeli oa CVD oa mohato
Liquid-phase CVD e sebelisa selelekela sa mokelikeli, hangata motsoako oa motsoako o nang le silicon le motsoako oa silanol, o futhumatsang le ho kenngoa mouoane ka kamoreng ea ho itšoara, ebe filimi ea silicon carbide e thehoa holim'a substrate ka lik'hemik'hale tsa lik'hemik'hale.
2. Litšobotsi tsa ts'ebetso eaCVD silicon carbide coating
1.Ts'ebetso e ntle haholo ea mocheso o phahameng
CVD silicon carbide coatingsfana ka botsitso bo phahameng ba mocheso le ho hanyetsa oxidation. E khona ho sebetsa maemong a mocheso o phahameng 'me e khona ho mamella maemo a feteletseng a mocheso o phahameng.
2.Lintho tse ntle tsa mechine
CVD silicon carbide coatinge na le boima bo phahameng le khanyetso e ntle ea ho apara. E sireletsa li-substrates tsa tšepe hore li se ke tsa senyeha le ho senyeha, e lelefatsa bophelo ba tšebeletso ea thepa.
3. Botsitso bo botle ba lik'hemik'hale
CVD silicon carbide coatingsli hanyetsana haholo le lik'hemik'hale tse tloaelehileng tse kang acid, alkalis le letsoai. E hanela tlhaselo ea lik'hemik'hale le ho bola ha substrate.
4. Coefficient e tlase ea likhohlano
CVD silicon carbide coatinge na le coefficient e tlase ea likhohlano le thepa e ntle ea ho itlotsa. E fokotsa likhohlano le ho khathala le ho ntlafatsa ts'ebeliso ea thepa.
5.Good conductivity mogote
CVD silicon carbide coating e na le thepa e ntle ea ho tsamaisa mocheso. E ka tsamaisa mocheso ka potlako le ho ntlafatsa katleho ea mocheso oa motheo oa tšepe.
6.Tlhahiso e babatsehang ea ho kenya motlakase
CVD silicon carbide coating e na le thepa e ntle ea ho kenya motlakase 'me e ka thibela ho lutla ha hona joale. E sebelisoa haholo ts'ireletso ea insulation ea lisebelisoa tsa elektroniki.
7. Fetola botenya le sebopeho
Ka ho laola maemo nakong ea ts'ebetso ea CVD le mahloriso a selelekela, botenya le sebopeho sa filimi ea silicon carbide e ka fetoloa. Sena se fana ka likhetho tse ngata le ho fetoha habonolo bakeng sa lits'ebetso tse fapaneng.
Ka bokhutšoanyane, CVD silicon carbide coating e na le ts'ebetso e ntle haholo ea mocheso o phahameng, thepa e ntle ea mochini, botsitso ba lik'hemik'hale tse ntle, coefficient e tlase ea likhohlano, conductivity e ntle ea mocheso le thepa ea ho kenya motlakase. Mehaho ena e etsa hore CVD silicon carbide e sebelisoe haholo libakeng tse ngata, ho kenyeletsoa lisebelisoa tsa elektroniki, optics, aerospace, indasteri ea lik'hemik'hale, jj.
Nako ea poso: Mar-20-2024