Doonta graphite ee loo isticmaalo PECVD ee khadka wax soo saarka unugyada cadceedda
Soo saarista unugyada qoraxda waxay u baahan tahay lix hab oo waaweyn: qoraalka, faafinta, etching, dahaarka, daabacaadda shaashadda iyo sintering. Soo saarista unugyada cadceedda, habka daahan tuubada PECVD waxay isticmaashaa doonta graphite sida jidhka shaqada. Habka daahanku wuxuu adeegsadaa kaydinta uumiga kiimikada ee la xoojiyay si loogu shubo filimka nitride silikoon xagga hore ee waferka silikoon si loo yareeyo milicsiga iftiinka qoraxda iyo dusha sare ee wafer silikoon.
Astaamaha doonteena garaafka ee PECVD:
1). La qaatay si loo baabi'iyo tignoolajiyada "lenses midabka" , si loo hubiyo iyada oo aan lahayn "lenses koloe" inta lagu jiro habka muddada dheer.
2). Waxa laga sameeyay shayga garaafka ah ee la soo dhoofiyo oo leh daahir sare, ka kooban wasakh hoose iyo xoog sare.
3). Isticmaalka dhoobada 99.9% ee isku dhafka dhoobada oo leh waxqabad adag oo u adkaysta daxalka iyo caddaynta burushka.
4). Isticmaalka qalabka habaynta saxda ah si loo hubiyo saxnaanta qayb kasta.
Tilmaamid
Shayga | Nooca | Qaadaha nambarka wafer |
PEVCD Graphite Doon --- Taxanihii 156 | 156-13 doon graphite | 144 |
156-19 doonta garaafka | 216 | |
156-21 doon graphite | 240 | |
156-23 doon graphite | 308 | |
PEVCD Graphite Doon --- Taxanaha 125 | 125-15 doonta graphite | 196 |
125-19 doon graphite | 252 | |
125-21 doon graphite | 280 |
Ningbo VET Energy Technology Co., Ltd waa shirkad tignoolajiyada sare ah oo diiradda saareysa wax soo saarka iyo iibinta qalabka sare ee heer-sare, agabka iyo tignoolajiyada oo ay ku jiraan graphite, silicon carbide, ceramics, daaweynta dusha sare sida daahan SiC, daahan TaC, carbon galaas daahan, daahan carbon pyrolytic, iwm, alaabtan waxaa si ballaaran loo isticmaalaa in photovoltaic, semiconductor, tamarta cusub, metallurgy, iwm ..
Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxayna sameeyeen teknoolojiyado badan oo la aqoonsan yahay si loo hubiyo tayada wax soo saarka iyo tayada, waxay sidoo kale siin karaan macaamiisha xalal qalab xirfadeed.