PECVD Soodejinaya Saxaarada Garaafka Dhigashada

PECVD Soodejinaya Saxaafka Dhigashada Sawirka Sawirka

Sharaxaad Gaaban:

Weelka-qaadista VET Energy ee PECVD waxaa loogu talagalay in lagu bixiyo badbaado iyo xitaa taageero maroodiyaal inta lagu jiro meel dhigista, hagaajinta joogtaynta iyo tayada habka dhigista. Iyada oo iska caabbinta kulaylka aadka u fiican, Tray Graphite wuxuu caawiyaa ilaalinta jawiga la xakameeyey gudaha qolalka PECVD, yaraynta khatarta wasakheynta iyo hubinta hufnaanta nidaamka sare.

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Faahfaahinta Alaabta

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VET Energy saxaarad rarida PECVD waa side saxda ah ee loogu talagalay PECVD (plasma xoojiyey kaydinta uumiga kiimikada). Saxaarad garaafeed oo tayo sare leh oo dhigaal ah ayaa ka samaysan saafid sare, cufnaanta sare ee garaafka. Waxay leedahay iska caabin heerkul sare oo heer sare ah, iska caabin daxalka, xasilloonida cabbirka iyo sifooyin kale. Waxay ku siin kartaa madal xanbaarsan oo xasiloon habka PECVD waxayna hubisaa isku-duubnida iyo fidsanaanta dhigidda filimka.

VET Energy saxaarad rarida PECVD waxaa si weyn loogu isticmaalaa semiconductor, photovoltaic, LED iyo goobaha kale. Tusaale ahaan:

Semiconductor: Habka PECVD ee agabka semiconductor-ka sida waferrada silikoonka iyo maraqa epitaxial.

▪ Photovoltaic: Habka PECVD ee filimaanta khafiifka ah ee unugyada qorraxda.

▪ LED: Habka PECVD ee chips-ka LED.

Faa'iidooyinka Alaabta

▪Hagaajinta tayada filimka:Hubi meel dhigista filimka isku midka ah oo wanaaji tayada filimka.

▪Kordhi nolosha qalabka:Iska caabbinta daxalka aad u fiican, waxay kordhisaa nolosha adeegga qalabka PECVD.

▪Iska yaree kharashka wax soo saarka:Saxarada garaafyada tayada sare leh waxay yareyn kartaa heerka qashinka waxayna yareyn kartaa kharashka wax soo saarka.

Walaxda graphite ee SGL:

Qiyaasta caadiga ah: R6510
Tusmada	Tijaabi heerka	Qiimaha	Unug
Celceliska cabbirka hadhuudhka	ISO 13320	10	μm
Cufnaanta weyn	DIN IEC 60413/204	1.83	g/cm³
Bannaanka furan	DIN66133	10	%
Cabbirka daloolka dhexdhexaadka ah	DIN66133	1.8	μm
Joogteynta	DIN 51935	0.06	cm²/s
Rockwell adkaanta HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoog dabacsanaan	DIN IEC 60413/501	60	MPa
Xoog cadaadis leh	DIN 51910	130	MPa
Hababka dhalinyarada	DIN 51915	11.5×10³	MPa
Balaadhinta kulaylka (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Dhaqdhaqaaqa kulaylka (20 ℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.

Shayga	Nooca	Qaadaha nambarka wafer
PEVCD Grephite doon - Taxanaha 156	156-13 grephite doon	144
	156-19 grephite doon	216
	156-21 grephite doon	240
	156-23 doon graphite	308
PEVCD Grephite doon - The 125 taxane	125-15 grephite doon	196
	125-19 grephite doon	252
	125-21 doonta gphite	280