VET TamartaDoonta graphite PECVD ee unugyada cadceeddu waa udub dhexaadka la isticmaalo ee loogu talagalay PECVD (plasma xoojiyey kaydinta uumiga kiimikada) ee habka unugyada cadceedda. Doonta garaafka waxay ka samaysan tahay garaafka istatic-ga saafiga ah ee sarreeya oo leh dalool ka yar 15% iyo qallafsanaanta dusha sare ee Ra≤1.6μm. Waxay leedahay sifooyin aad u wanaagsan sida iska caabbinta heerkulka sare, iska caabinta daxalka, iyo xasilloonida cabbirka. Degenaansho cabbir heer sare ah iyo dhaqdhaqaaqa kulaylka waxay hubisaa dhigista filimka isku midka ah waxayna wanaajisaa waxtarka batteriga. Waxay ku siin kartaa side degan jawi heerkul sare iyo cadaadis sare leh PECVD si loo hubiyo in la isku mid ah dhigo iyo tayada sare ee filimada unugyada cadceedda.
Walaxda graphite ee SGL:
Qiyaasta caadiga ah: R6510 | |||
Tusmada | Tijaabi heerka | Qiimaha | Unug |
Celceliska cabbirka hadhuudhka | ISO 13320 | 10 | μm |
Cufnaanta weyn | DIN IEC 60413/204 | 1.83 | g/cm3 |
Bannaanka furan | DIN66133 | 10 | % |
Cabbirka daloolka dhexdhexaadka ah | DIN66133 | 1.8 | μm |
Joogteynta | DIN 51935 | 0.06 | cm²/s |
Rockwell adkaanta HR5/100 | DIN IEC60413/303 | 90 | HR |
Iska caabin koronto oo gaar ah | DIN IEC 60413/402 | 13 | μΩm |
Xoog dabacsanaan | DIN IEC 60413/501 | 60 | MPa |
Xoog cadaadis leh | DIN 51910 | 130 | MPa |
Hababka dhalinyarada | DIN 51915 | 11.5×10³ | MPa |
Balaadhinta kulaylka (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
Dhaqdhaqaaqa kulaylka (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.
Shayga | Nooca | Qaadaha nambarka wafer |
PEVCD Grephite doon - Taxanaha 156 | 156-13 grephite doon | 144 |
156-19 grephite doon | 216 | |
156-21 grephite doon | 240 | |
156-23 doon graphite | 308 | |
PEVCD Grephite doon - The 125 taxane | 125-15 grephite doon | 196 |
125-19 grephite doon | 252 | |
125-21 doonta gphite | 280 |