Susceptor Foosto Dahaarka leh ee SiC

Sharaxaad Gaaban:

VET Energy SiC Dahaarka Foostada Susceptor waa badeecad wax qabad sare leh oo loogu talagalay inay bixiso waxqabad joogto ah oo la isku halayn karo muddo dheer. Waxay leedahay caabbinta kulaylka wanaagsan iyo lebiska kulaylka, nadiif sare, caabbinta nabaad-guurka, taas oo ka dhigaysa xalka ugu fiican ee codsiyada wax-qabadka wafer.

Meesha Asal ahaan:Shiinaha

Qaab dhismeedka Crystal:wajiga FCCβ

Cufnaanta:3.21 g/cm;

Adag:2500 Vickers;

Cabbirka Hadhuudhka:2 ~ 10μm;

Nadiifadda Kiimikada:99.99995%;

Awoodda kulaylka:640J · kg-1·K-1;

Heerkulka Sublimation:2700 ℃;

Xoogga Felexural:415 Mpa (RT 4-dhibcood);

Modulka dhalinyarada:430 Gpa (4pt laab, 1300 ℃);

Balaadhinta kulaylka (CTE):4.5 10-6K-1;

Habdhaqanka Kulaylka:300 (W/MK);

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Faahfaahinta Alaabta

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Neefta foosto is a furahaqayb loo isticmaalo hababka wax soo saarka semiconductor kala duwan.Waxaan isticmaalnaa tignoolajiyadayada patented si aan u samaynonuglaanta foostolehdaahirnimo aad u saraysa,wanaagsandaahanisku midnimoiyo nolol adeeg oo aad u wanaagsan, sidoo kalecaabbinta kiimikada sare iyo sifooyinka xasiloonida kulaylka.

VET Energy waa ahsoo saaraha dhabta ah ee alaabta graphite iyo silikoon carbide oo leh daahan CVD,keeni karakala duwanqaybo gaar ah oo loogu talagalay semiconductor iyo warshadaha sawirkavoltaic. Okooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ahadiga.

Waxaan si joogto ah u horumarinaa habab horumarsan si aan u bixinno agab aad u horumarsan,iyowaxay ka shaqeeyeen tignoolajiyada gaarka ah ee rukhsadda leh, taas oo ka dhigi karta isku xidhka dahaarka iyo substrate-ka mid adag oo u nugul goynta.

FCunista alaabtayada:

1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700℃.
2. daahir sare iyolebbiska kulaylka
3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.
4. Adag sare, oogada is haysta, qaybo yaryar.
5. Cimri dheer oo adeeg iyo waarta

CVD SiC薄膜基本物理性能 Tilmaamaha asaasiga ah ee CVD SiCdaahan
性质 / Hanti	典型数值 / Qiimaha caadiga ah
晶体结构 / Dhismaha Crystal	FCC β wejiga多晶，主要为（111) 取向
密度 / Cufnaanta	3.21 g/cm³
硬度 / Adag	2500 维氏硬度（500g oo culeys ah
晶粒大小 / Hadhuudhka Size	2 ~ 10μm
纯度 / Nadiifnimada Kiimikada	99.99995%
热容 / Awoodda kulaylka	640 · kg^-1·K^-1
升华温度 / Heerkulka Sublimation	2700 ℃
抗弯强度 / Xoog Jilicsan	415 MPa RT 4-dhibic
杨氏模量 /Dhallinyarada Modulus	430 Gpa 4pt laab, 1300 ℃
导热系数 / ThermalHab-dhaqanka	300W·m^-1·K^-1
热膨胀系数 / Balaadhinta kulaylka (CTE)	4.5×10^-6K^-1