Silicon Carbide Dahaarka Garaafka Dahaarka ah ee Etching LED

Sharaxaad Gaaban:

Silicon carbide susceptor for LED etching (SiC tray) waa qalab gaar ah oo loogu talagalay etching qoto dheer ee silikoon (mashiinka etching ICP). qaade wafer, sidoo kale loo yaqaan sida wafer, side wafer silikoon, oo sidoo kale loo yaqaan wafer jeebka. Si weyn loogu isticmaalo semiconductor CVD iyo vacuum sputtering.


Faahfaahinta Alaabta

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Silikon carbide oo dahaarka leh ayaa aha furahaqayb loo isticmaalo hababka wax soo saarka semiconductor kala duwan.Waxaan u isticmaalnaa tignoolajiyadayada patented si aan uga dhigno susceptor silikoon carbide dahaarka lehdaahirnimo aad u sareysa,wanaagsandaahanisku midnimoiyo nolol adeeg oo aad u wanaagsan, sidoo kalecaabbinta kiimikada sare iyo sifooyinka xasiloonida kulaylka.

VET Energy waa ahsoo saaraha dhabta ah ee alaabta graphite iyo silikoon carbide oo leh daahan CVD,keeni karakala duwanqaybo gaar ah oo loogu talagalay semiconductor iyo warshadaha sawirkavoltaic. Okooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ahadiga.

Waxaan si joogto ah u horumarinaa habab horumarsan si aan u bixinno agab horumarsan,iyowaxay ka shaqeeyeen tignoolajiyada gaarka ah ee rukhsadda leh, taas oo ka dhigi karta isku xidhka dahaarka iyo substrate-ka mid adag oo u nugul goynta.

FCunista alaabtayada:

1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700.
2. daahir sare iyoisku mid ahaanshaha kulaylka
3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.
4. Qalafsanaan sare, oogada is haysta, qaybo yaryar.
5. Cimri dheer oo adeeg iyo waarta

CVD SiC薄膜基本物理性能

Tilmaamaha asaasiga ah ee CVD SiCdaahan

性质 / Hanti

典型数值 / Qiimaha caadiga ah

晶体结构 / Dhismaha Crystal

FCC β wejiga多晶,主要为(111) 取向

密度 / Cufnaanta

3.21 g/cm³

硬度 / Adag

2500 维氏硬度(500g oo culeys ah

晶粒大小 / Hadhuudhka Size

2 ~ 10μm

纯度 / Nadiifnimada Kiimikada

99.99995%

热容 / Awoodda kulaylka

640 · kg-1·K-1

升华温度 / Heerkulka Sublimation

2700 ℃

抗弯强度 / Xoog Jilicsan

415 MPa RT 4-dhibic

杨氏模量 Modulka da'da yar

430 Gpa 4pt laab, 1300 ℃

导热系数 / ThermalHab-dhaqanka

300W·m-1·K-1

热膨胀系数 / Balaadhinta kulaylka (CTE)

4.5×10-6K-1

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Si diiran kuugu soo dhawoow inaad soo booqato warshadeena, aynu wada hadal dheeraad ah yeelano!

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