Qaadaha Dahaarka ee RTP/RTA SiC ee Kobaca Epitaxial MOCVD

Sharaxaad Gaaban:

VET Energy RTP/RTA SiC Coating Carrier waa badeecad waxqabad sare leh oo loogu talagalay in lagu bixiyo waxqabad joogto ah oo la isku halayn karo muddo dheer. Waxay leedahay caabbinta kulaylka wanaagsan iyo lebiska kulaylka, nadiif sare, caabbinta nabaad-guurka, taas oo ka dhigaysa xalka ugu fiican ee codsiyada wax-qabadka wafer.


  • Meesha Asal ahaan:Shiinaha
  • Qaab dhismeedka Crystal:wajiga FCCβ
  • Cufnaanta:3.21 g/cm
  • Adag:2500 Vickers
  • Cabirka Hadhuudhka:2 ~ 10μm
  • Nadiifadda Kiimikada:99.99995%
  • Awoodda kulaylka:640J·kg-1·K-1
  • Heerkulka Sublimation:2700 ℃
  • Xoogga Felexural:415 Mpa (RT 4-dhibcood)
  • Modulka dhalinyarada:430 Gpa (4pt laab, 1300 ℃)
  • Balaadhinta kulaylka (CTE):4.5 10-6K-1
  • Habdhaqanka Kulaylka:300 (W/MK)
  • Faahfaahinta Alaabta

    Tags Product

    SiC Coating Carrier RTP/RTA waa qayb muhiim ah oo loo isticmaalo hababka wax soo saarka semiconductor ee loo yaqaan "Rapid Thermal Processing & Annealing", waxaan isticmaalnaa tignoolajiyadayada patented si aan uga dhigno side silikoon nadiif ah oo aad u sarreeya, lebbis dahaar wanaagsan iyo nolol adeeg oo aad u wanaagsan, sida sidoo kale iska caabin sare oo kiimiko ah iyo sifooyinka xasiloonida kulaylka.

    Tilmaamaha alaabtayada:

    1. Iska caabbinta oksaydhka heerkulka sare ilaa 1700 ℃.
    2. Nadiif sare iyo isku mid ahaanshaha kulaylka
    3. iska caabin daxalka heer sare ah: acid, alkali, cusbo iyo reagents organic.

    4. Qalafsanaan sare, oogada is haysta, qaybo yaryar.
    5. Cimri dheer oo adeeg iyo waarta

    CVD SiC薄膜基本物理性能

    Tilmaamaha asaasiga ah ee CVD SiCdaahan

    性质 / Hanti

    典型数值 / Qiimaha caadiga ah

    晶体结构 / Dhismaha Crystal

    FCC β wejiga多晶,主要为(111) 取向

    密度 / Cufnaanta

    3.21 g/cm³

    硬度 / Adag

    2500 维氏硬度(500g oo culeys ah

    晶粒大小 / Hadhuudhka Size

    2 ~ 10μm

    纯度 / Nadiifnimada Kiimikada

    99.99995%

    热容 / Awoodda kulaylka

    640 · kg-1·K-1

    升华温度 / Heerkulka Sublimation

    2700 ℃

    抗弯强度 / Xoog Jilicsan

    415 MPa RT 4-dhibic

    杨氏模量 Modulka da'da yar

    430 Gpa 4pt laab, 1300 ℃

    导热系数 / ThermalHab-dhaqanka

    300W·m-1·K-1

    热膨胀系数 / Balaadhinta kulaylka (CTE)

    4.5×10-6K-1

    1

    2

    VET Energy waa soo saaraha dhabta ah ee garaafyada la habeeyay iyo alaabada silikoon carbide leh dahaaryo kala duwan sida daahan SiC, daahan TaC, daahan kaarboon dhalo ah, daahan kaarboon pyrolytic, iwm, siin kara qaybo kala duwan oo habaysan ee semiconductor iyo warshadaha photovoltaic.

    Kooxdayada farsamo waxay ka yimaadaan hay'adaha cilmi-baarista gudaha ee ugu sarreeya, waxay ku siin karaan xalal qalab xirfadeed oo dheeraad ah adiga.

    Waxaan si joogto ah u horumarinaa habab horumarsan si aan u bixinno qalab aad u horumarsan, waxaanan ka shaqeynay tignoolajiyada gaarka ah ee patented, taas oo ka dhigi karta isku xidhka dahaarka iyo substrate-ka mid adag oo u nugul goynta.

    Si diiran kuugu soo dhawoow inaad soo booqato warshadeena, aynu wada hadal dheeraad ah yeelano!

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