Qabaha Wafer Substrate-ka ee PECVD

Qabaha Wafer Substrate Substrate ee Sawirka Sifaysan ee PECVD

Sharaxaad Gaaban:

Haysta Substrate-ka ee VET Energy waxa loo habeeyey si uu u ilaaliyo toosinta wafer-ka iyo xasiloonida inta lagu jiro nidaamka PECVD, ka hortagga faddaraynta iyo yaraynta khatarta dhaawaca. Haystaha Wafer-ka ee Graphite wuxuu bixiyaa meel sugan, xitaa madal, hubinta in maraqyada ay si siman u soo bandhigaan balasmaha si joogto ah iyo meel dhigis tayo sare leh. Iyada oo ay ku jirto kuleylkeeda sare iyo xoogga gaarka ah, haystahani wuxuu caawiyaa hagaajinta waxtarka guud ee habka iyo waxqabadka alaabta.

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Faahfaahinta Alaabta

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VET Tamarta Graphite Substrate Wafer Holder waa side saxda ah ee loogu talagalay PECVD Qalabkan Graphite Substrate-ka ah ee tayada sare leh waxa uu ka samaysan yahay saafi-sare, walxo garaafka cufnaanta sare leh, oo leh iska caabin heerkul sare oo aad u wanaagsan, iska caabin daxalka, xasiloonida cabbirka iyo sifooyin kale. Waxay ku siin kartaa madal taageero oo xasilloon oo loogu talagalay geeddi-socodka PECVD waxayna hubisaa isku-duubnaanta iyo fidsanaanta dhigidda filimka.

Habka VET Energy PECVD shaxda taageerada wafer wafer wuxuu leeyahay sifooyinka soo socda:

▪Nadiifin sare:Waxyaabaha wasakhaysan oo aad u hooseeya, iska ilaali wasakhowga filimka, hubi tayada filimka.

▪Cufnaanta sare:cufnaanta sare, xoogga farsamada sare, waxay u adkeysan kartaa heerkulka sare iyo cadaadiska sare ee deegaanka PECVD.

▪Degenaansho cabbir wanaagsan:isbeddel cabbir yar oo heerkul sarreeya, hubinta xasilloonida habka.

▪Dhaqdhaqaaq kuleyl oo heer sare ah:si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka wafer.

▪Iska caabbinta daxalka xooggan:waxay u adkeysan kartaa nabaad guurka gaasaska daxalka ee kala duwan iyo balaasmaha.

▪Adeegga gaarka ah:miisaska taageerada graphite ee cabbirro iyo qaabab kala duwan ayaa loo habeyn karaa iyadoo loo eegayo baahida macaamiisha.

Faa'iidooyinka Alaabta

▪Hagaajinta tayada filimka:Hubi meel dhigista filimka isku midka ah oo wanaaji tayada filimka.

▪Kordhi nolosha qalabka:Iska caabbinta daxalka aad u fiican, waxay kordhisaa nolosha adeegga qalabka PECVD.

▪Iska yaree kharashka wax soo saarka:Saxarada garaafyada tayada sare leh waxay yareyn kartaa heerka qashinka waxayna yareyn kartaa kharashka wax soo saarka.

Walaxda graphite ee SGL:

Qiyaasta caadiga ah: R6510
Tusmada	Tijaabi heerka	Qiimaha	Unug
Celceliska cabbirka hadhuudhka	ISO 13320	10	μm
Cufnaanta weyn	DIN IEC 60413/204	1.83	g/cm³
Bannaanka furan	DIN66133	10	%
Cabbirka daloolka dhexdhexaadka ah	DIN66133	1.8	μm
Joogteynta	DIN 51935	0.06	cm²/s
Rockwell adkaanta HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoog dabacsanaan	DIN IEC 60413/501	60	MPa
Xoog cadaadis leh	DIN 51910	130	MPa
Hababka dhalinyarada	DIN 51915	11.5×10³	MPa
Balaadhinta kulaylka (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Dhaqdhaqaaqa kulaylka (20 ℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.

Shayga	Nooca	Qaadaha nambarka wafer
PEVCD Grephite doon - Taxanaha 156	156-13 grephite doon	144
	156-19 grephite doon	216
	156-21 grephite doon	240
	156-23 doon graphite	308
PEVCD Grephite doon - The 125 taxane	125-15 grephite doon	196
	125-19 grephite doon	252
	125-21 doonta gphite	280