Taageerada Wafer Graphite PECVD

Taageerada Wafer ee PECVD Sawirka Sawirka

Sharaxaad Gaaban:

Loogu talagalay saxnaanta iyo waxqabadka, VET Energy's Graphite Wafer Support waa shayga ugu habboon ee loo isticmaalo habaynta waferka horumarsan, halkaas oo xasilloonida kulaylka sare iyo waxqabadka joogtada ahi ay muhiim yihiin. Haddi aad la shaqaynayso wafers semiconductor ama substrates kale oo jilicsan, taageeradan tayada sare leh ee garaafka ayaa kor u qaadi doonta isku halaynta nidaamkaaga iyo tayada badeecada, taasoo ka dhigaysa qayb aan looga maarmin wax soo saarka casriga ah.

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Faahfaahinta Alaabta

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Habka VET Energy PECVD kaalmada wafer garaafiga waa udub dhexaadka la isticmaalo ee loogu talagalay PECVD Alaabtaani waxay ka samaysan tahay nadiif sare, graphite cufnaanta sare leh, oo leh iska caabin heerkul sare oo heer sare ah, iska caabin daxalka, xasilloonida cabbirka iyo sifooyin kale, waxay ku siin kartaa madal taageero ah oo xasilloon oo loogu talagalay geeddi-socodka PECVD, si loo hubiyo isku-dhafka iyo fidsanaanta dhejinta filimka.

Naqshadeynta "taageerada garaafka" ee VET Tamarta graphite wafer taageero ma aha oo kaliya inay si wax ku ool ah u taageerto waferka, laakiin sidoo kale waxay bixisaa xasilloonida kulaylka heerkulka sare iyo cadaadiska sare ee deegaanka PECVD si loo hubiyo xasilloonida habka.

Habka VET Energy PECVD taageerada wafer wafer wuxuu leeyahay sifooyinka soo socda:

▪Nadiifin sare:Waxyaabaha wasakhaysan oo aad u hooseeya, iska ilaali wasakheynta filimka, si loo hubiyo tayada filimka.

▪Cufnaanta sare:cufnaanta sare, xoogga farsamada sare, waxay u adkeysan kartaa heerkulka sare iyo cadaadiska sare ee deegaanka PECVD.

▪Degenaansho cabbir wanaagsan:isbeddelo cabbir yar oo heerkul sare ah si loo hubiyo xasilloonida habka.

▪Dhaqdhaqaaq kuleyl oo heer sare ah:si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka wafer.

▪Iska caabbinta daxalka xooggan:Awood u leh in uu iska caabiyo nabaad guurka gaasaska daxalka ah ee kala duwan iyo balaasmaha.

▪Adeegga gaarka ah:Miisaska taageerada graphite ee cabbirka iyo qaababka kala duwan ayaa lagu habeyn karaa iyadoo loo eegayo baahiyaha macaamiisha.

Walaxda graphite ee SGL:

Qiyaasta caadiga ah: R6510
Tusmada	Tijaabi heerka	Qiimaha	Unug
Celceliska cabbirka hadhuudhka	ISO 13320	10	μm
Cufnaanta weyn	DIN IEC 60413/204	1.83	g/cm³
Bannaanka furan	DIN66133	10	%
Cabbirka daloolka dhexdhexaadka ah	DIN66133	1.8	μm
Joogteynta	DIN 51935	0.06	cm²/s
Rockwell adkaanta HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoog dabacsanaan	DIN IEC 60413/501	60	MPa
Xoog cadaadis leh	DIN 51910	130	MPa
Hababka dhalinyarada	DIN 51915	11.5×10³	MPa
Balaadhinta kulaylka (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Dhaqdhaqaaqa kulaylka (20 ℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.

Shayga	Nooca	Qaadaha nambarka wafer
PEVCD Grephite doon - Taxanaha 156	156-13 grephite doon	144
	156-19 grephite doon	216
	156-21 grephite doon	240
	156-23 doon graphite	308
PEVCD Grephite doon - The 125 taxane	125-15 grephite doon	196
	125-19 grephite doon	252
	125-21 doonta gphite	280