VET Tamarta garaafiga doonnida wafer waa tamar aad u saraysa oo la isticmaalo oo loogu talagalay hababka dhigista semiconductor, photovoltaic iyo warshadaha kale. Waxyaalaha graphite-ka ah ee cufnaanta sare leh ee ka samaysan daahir-sare, cufnaanta sare, alaabtani waxay leedahay iska caabin heerkul sare oo heer sare ah, iska caabin daxalka, xasilloonida cabbirka iyo sifooyin kale, waxayna ku siin kartaa madal side ah oo xasilloon oo loogu talagalay geeddi-socodka dhigaalka si loo hubiyo isku-duubnaanta iyo fidsanaanta dhejiska filimka khafiifka ah. .
Doonta garaafiga ee PECVD ee ka socota VET Energy waxa lagu soo saaray garaafyo saafi ah oo saafi ah, oo ka muuqda porosity ka hooseeya 15% iyo qallafsanaanta dusha sare ee Ra≤1.6μm. Deganaanshaha cabbirka sare iyo dhaqdhaqaaqa kulaylka waxay hubisaa dhigista filimka isku midka ah iyo kor u qaadista waxtarka unugyada.
Walaxda graphite ee SGL:
Qiyaasta caadiga ah: R6510 | |||
Tusmada | Tijaabi heerka | Qiimaha | Unug |
Celceliska cabbirka hadhuudhka | ISO 13320 | 10 | μm |
Cufnaanta weyn | DIN IEC 60413/204 | 1.83 | g/cm3 |
Bannaanka furan | DIN66133 | 10 | % |
Cabbirka daloolka dhexdhexaadka ah | DIN66133 | 1.8 | μm |
Joogteynta | DIN 51935 | 0.06 | cm²/s |
Rockwell adkaanta HR5/100 | DIN IEC60413/303 | 90 | HR |
Iska caabin koronto oo gaar ah | DIN IEC 60413/402 | 13 | μΩm |
Xoog dabacsanaan | DIN IEC 60413/501 | 60 | MPa |
Xoog cadaadis leh | DIN 51910 | 130 | MPa |
Hababka dhalinyarada | DIN 51915 | 11.5×10³ | MPa |
Balaadhinta kulaylka (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
Dhaqdhaqaaqa kulaylka (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.
Shayga | Nooca | Qaadaha nambarka wafer |
PEVCD Grephite doon - Taxanaha 156 | 156-13 grephite doon | 144 |
156-19 grephite doon | 216 | |
156-21 grephite doon | 240 | |
156-23 doon graphite | 308 | |
PEVCD Grephite doon - The 125 taxane | 125-15 grephite doon | 196 |
125-19 grephite doon | 252 | |
125-21 doonta gphite | 280 |