Qaadaha garaafka ee habka PECVD

Sidaha garaafka ee habka PECVD Sawirka sifaysan

Sharaxaad Gaaban:

VET TamartaPECVD Graphite Boat for Solar Panel waa qayb horumarsan oo si gaar ah loogu nashqadeeyay soo saarida baalal cadceedda oo tayo sare leh. Loo isticmaalo habraacyada kaydinta uumiga kiimikada ee la wanaajiyey ee Plasma (PECVD), doontan garaafka ahi waxay hubisaa maaraynta agabka ugu wanaagsan iyo meel dhigista aflaanta khafiifka ah ee unugyada cadceedda. Waxaa loo farsameeyay saxnaanta iyo cimri dhererka, waxa ay bixisa kulaylka sareeyo, iska caabinta daxalka, iyo wasakhda ugu yar, kuwaas oo lagamamaarmaan u ah soo saarista cadceeddo tayo sare leh oo tayo sare leh.

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Faahfaahinta Alaabta

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VET TamartaSidaha habka garaafyada ee habka PECVD waa adeeg tayo sare leh oo loogu talagalay PECVD Qaadida graphite Tani waxay ka samaysan tahay nadiif sare, cufnaanta cufnaanta sare, oo leh iska caabin heerkul sarreeya oo heer sare ah, iska caabin daxalka, xasilloonida cabbirka iyo sifooyin kale, waxay ku siin kartaa madal side ah oo xasilloon oo loogu talagalay geeddi-socodka PECVD, si loo hubiyo isku-dhafka iyo fidsanaanta filimka khafiifka ah. dhigid.

Qaadayaasha garaafka ee nidaamka PECVD waxay leeyihiin sifooyinka soo socda:

Nadiifin sare: maadada wasakhdu aad u hooseyso, ka fogaanshaha wasakheynta filimka iyo hubinta tayada filimka.

Cufnaanta sare: cufnaanta sare, xoogga farsamada sare, awood u leh u adkeysiga heerkulka sare iyo cadaadiska sare ee deegaanka PECVD.

▪ Deggenaansho cabbir wanaagsan: isbeddel cabbir yar oo heerkul sarreeya, hubinta xasilloonida habka.

▪ Dhaqdhaqaaq kuleyl oo heer sare ah: si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka waferka.

▪ Iska caabin daxalka adag: awood u leh inuu iska caabiyo nabaadguurka gaasaska daxalka ee kala duwan iyo balaasmaha.

Adeegga la habeeyey: qaadayaasha garaafka ee cabbirka iyo qaababka kala duwan ayaa loo habeyn karaa iyadoo loo eegayo baahida macaamiisha.

Walaxda graphite ee SGL:

Qiyaasta caadiga ah: R6510
Tusmada	Tijaabi heerka	Qiimaha	Unug
Celceliska cabbirka hadhuudhka	ISO 13320	10	μm
Cufnaanta weyn	DIN IEC 60413/204	1.83	g/cm³
Bannaanka furan	DIN66133	10	%
Cabbirka daloolka dhexdhexaadka ah	DIN66133	1.8	μm
Joogteynta	DIN 51935	0.06	cm²/s
Rockwell adkaanta HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoog dabacsanaan	DIN IEC 60413/501	60	MPa
Xoog cadaadis leh	DIN 51910	130	MPa
Hababka dhalinyarada	DIN 51915	11.5×10³	MPa
Balaadhinta kulaylka (20-200 ℃)	DIN 51909	4.2X10^-6	K^-1
Dhaqdhaqaaqa kulaylka (20 ℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay wax-soo-saarka unugyada cadceedda oo tayo sare leh, iyadoo taageerta G12 farsamaynta wafer-ga weyn. Naqshadeeynta sideha la wanaajiyay ayaa si weyn u kordhisa wax soo saarka, taasoo awood u siineysa heerarka wax soo saarka sare iyo qiimaha wax soo saarka oo hooseeya.

Shayga	Nooca	Qaadaha nambarka wafer
PEVCD Grephite doon - Taxanaha 156	156-13 grephite doon	144
	156-19 grephite doon	216
	156-21 grephite doon	240
	156-23 doon graphite	308
PEVCD Grephite doon - The 125 taxane	125-15 grephite doon	196
	125-19 grephite doon	252
	125-21 doonta gphite	280