Epitaxial Epi Graphite Barrel Susceptor

Epitaxial Epi Graphite Barrel Susceptor

Epitaxial Epi Graphite Barrel Susceptorndeye yakanyatsogadzirirwa rutsigiro uye yekudziya mudziyo unoshandiswa kubata uye kupisa semiconductor substrates panguva yekugadzira maitiro seDeposition kana Epitaxy maitiro.

Chimiro chayo chinosanganisira anowanzo cylindrical kana zvishoma mbiya-yakaita, pamusoro inoratidzira akawanda homwe kana mapuratifomu ekuisa mawaferi, anogona kuve akasimba kana maburi dhizaini, zvichienderana nenzira yekudziya.

Iwo makuru mabasa epitaxial barrel susceptor:

-Substrate rutsigiro: yakachengeteka inobata akawanda semiconductor wafers;
-Kupisa sosi: inopa tembiricha yakakwira inodiwa pakukura kuburikidza nekudziya;
-Tembiricha kufanana: inovimbisa kupisa kwakafanana kwe substrates;
-Kutenderera: kazhinji kutenderera panguva yekukura kuvandudza tembiricha uye gasi kugovera kufanana.

Kushanda musimboti weEpi graphite barrel susceptor:
- Muiyo epitaxial reactor, iyo barrel susceptor inopisa kune inodiwa tembiricha (kazhinji 1000 ℃-1200 ℃ yesilicon epitaxy);
-The barrel susceptor inotenderera kuti ive nechokwadi chekugovera tembiricha yakafanana uye kuyerera kwegesi;
-Reaction magasi anoora pakupisa kwakanyanya, achigadzira epitaxial layers pane substrate surface.

Applications:
-Inonyanya kushandiswa silicon epitaxial kukura
-Inoshandawo kune epitaxy yezvimwe semiconductor zvinhu seGaAs, InP, nezvimwe.

VET Energy inoshandisa yakakwira kuchena graphite neCVD-SiC coating kusimudzira kugadzikana kwemakemikari:

Zvakanakira zveVET Energy Epitaxial Epi Graphite Barrel Susceptor:

-Kugadzikana kwekushisa kwepamusoro;
-Good thermal kufanana;
-Inogona kugadzirisa akawanda substrates panguva imwe chete, kuvandudza kugadzirwa kwekugadzira;
-Chemically inert, kuchengetedza yakakwirira-kuchena kukura nharaunda.