Tantalum karbide yatwikiriye susceptor ya wafer

Ibisobanuro bigufi:

Semicera nuyoboye tekinoroji yo gukingira ubushyuhe bwo hejuru kandi twishimiye kumenyekanisha ibicuruzwa bitwikiriye CVD Tantalum Carbide (TaC) kugirango bitange ubushyuhe bwizewe bwo hejuru kubushakashatsi bwa grafite.Graphite ni ibikoresho byiza cyane birwanya ubushyuhe bwo hejuru, ariko bikunda kwibasirwa nubushyuhe bwinshi, bidashobora kwirindwa rwose no mu itanura rya vacu.CVD Tantalum Carbide (TaC) itwikiriye irashobora gukumira neza okiside ya substrate ya grafite mugihe ikomeza gukora neza cyane.TaC kandi ni inert ishobora kurwanya reaction hamwe na gaze nka argon na hydrogen.Menyesha Semicera uyumunsi kugirango umenye byinshi kubyerekeranye na Tantalum Carbide CVD yometse kuri EPI suseptors kugirango umenye neza kandi wizewe mubisabwa ubushyuhe bukabije.

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Ibicuruzwa birambuye

Ibicuruzwa

TaC coating ni ubwoko bwa tantalum karbide (TaC) yateguwe nubuhanga bwo kubika imyuka yumubiri, ifite ibintu bikurikira:

1. Gukomera cyane: TaC itwikiriye ubukana buri hejuru, mubisanzwe irashobora kugera kuri 2500-3000HV, ni igifuniko cyiza cyane.

2. Kwambara birwanya: Ipfundikizo ya TaC irwanya kwambara cyane, irashobora kugabanya neza kwambara no kwangirika kwibice bya mashini mugihe cyo kuyikoresha.

3. Kurwanya ubushyuhe bwiza bwo hejuru: Ipfunyika rya TaC rirashobora kandi gukomeza imikorere myiza yubushyuhe bwo hejuru.

4. Imiti ihamye neza: Igikoresho cya TaC gifite imiti ihamye kandi gishobora kurwanya imiti myinshi nka acide na base.

Tantalum Carbide CVD Gufata EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Imiterere yumubiri ya TaC gutwikira
密度Ubucucike	14.3 (g / cm³)
比辐射率 / Emissivity yihariye	0.3
热膨胀系数 / Coefficient yo kwagura ubushyuhe	6.3 10^-6/K
努氏硬度/ Gukomera (HK)	2000 HK
电阻 / Kurwanya	1 × 10^-5 Ohm * cm
热稳定性 / Guhagarara neza	<2500 ℃
石墨尺寸变化 Ingano ya Graphite ihinduka	-10 ~ -20um
涂层厚度 / Ubunini	≥20um agaciro gasanzwe (35um ± 10um)

Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga bikubiyemo grafite, karibide ya silikoni, ububumbyi, kuvura hejuru n'ibindi.Ibicuruzwa bikoreshwa cyane mumafoto yerekana amashanyarazi, semiconductor, ingufu nshya, metallurgie, nibindi ..

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