TaC Coated Susceptor kubikoresho bya Epitaxy

TaC Yashizwemo Susceptor kubikoresho bya Epitaxy Yerekanwe Ishusho

Ibisobanuro bigufi:

VET itanga tantalum karbide yihariye (TaC) ibice bitandukanye nabatwara. Uburyo bwa mbere bwa VET butuma ibishishwa bya tantalum (TaC) bigera ku isuku ryinshi, ubushyuhe bukabije hamwe no kwihanganira imiti myinshi, kuzamura ubwiza bwibicuruzwa bya kristu ya SIC / GAN hamwe na EPI, kandi bikongerera ubuzima ibice byingenzi bigize reaction. Ikoreshwa rya tantalum karbide TaC ni ugukemura ikibazo cyuruhande no kuzamura ireme ryikura rya kirisiti, kandi VET imaze gutera imbere ikemura ikibazo cya tantalum carbide coating (CVD), igera kurwego mpuzamahanga rwateye imbere.

Ohereza imeri kuri twe Kuramo nka PDF

Ibicuruzwa birambuye

Ibicuruzwa

TaCsubstrate ni firime yoroheje ikozwetantalum karbideibikoresho, bikoreshwa hejuru yubutaka bwibikoresho bya epitaxial.Igikoresho cya TaCifite ibintu byinshi byiza, bituma ihitamo neza.

TaC coating ni ubwoko bwa tantalum karbide (TaC) yateguwe nubuhanga bwo kubika imyuka yumubiri, ifite ibintu bikurikira:

2. Kwambara birwanya: Ipfunyika rya TaC irwanya cyane kwambara, irashobora kugabanya neza kwambara no kwangirika kw ibice bya mashini mugihe cyo kuyikoresha.

3. Kurwanya ubushyuhe bwiza bwo hejuru: Ipfunyika rya TaC rirashobora kandi gukomeza imikorere yaryo munsi yubushyuhe bwo hejuru.

碳化钽涂层物理特性物理特性 Imiterere yumubiri ya TaC gutwikira
密度Ubucucike	14.3 (g / cm³)
比辐射率 / Emissivity yihariye	0.3
热膨胀系数 / Coefficient yo kwagura ubushyuhe	6.3 10^-6/K
努氏硬度/ Gukomera (HK)	2000 HK
电阻 / Kurwanya	1 × 10^-5 Ohm * cm
热稳定性 / Guhagarara neza	<2500 ℃
石墨尺寸变化 / Ingano yubushakashatsi	-10 ~ -20um
涂层厚度 / Ubunini	≥20um agaciro gasanzwe (35um ± 10um)

Ningbo VET Energy Technology Co., Ltd ni uruganda rukora ubuhanga buhanitse rwibanda ku gukora no kugurisha ibikoresho byo mu rwego rwo hejuru, ibikoresho n’ikoranabuhanga bikubiyemo grafite, karibide ya silikoni, ububumbyi, kuvura hejuru n'ibindi. Ibicuruzwa bikoreshwa cyane mumafoto yerekana amashanyarazi, semiconductor, ingufu nshya, metallurgie, nibindi ..

Itsinda ryacu rya tekinike rituruka mubigo byubushakashatsi bwo murugo, birashobora kuguha ibisubizo byumwuga kubwawe.

Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!