Vet-UbushinwaSilicon Carbide CeramicIpitingi nigikorwa kinini cyo gukingira ikozwe mu buryo bukomeye kandi idashobora kwihanganira kwambarasilicon karbide (SiC)ibikoresho, bitanga imiti myiza yo kurwanya ruswa hamwe nubushyuhe bwo hejuru. Ibi biranga nibyingenzi mubikorwa bya semiconductor, soSilicon Carbide Ceramic Coatingikoreshwa cyane mubice byingenzi bigize ibikoresho byo gukora semiconductor.
Uruhare rwihariye rwa Vet-ChineSilicon Carbide CeramicIpitingi mu musaruro wa semiconductor niyi ikurikira:
Kongera ibikoresho biramba:Silicon Carbide Ceramic Coating Silicon Carbide Ceramic Coating itanga uburinzi buhebuje kubikoresho byo gukora semiconductor hamwe nuburemere bwayo bukabije kandi birwanya kwambara. Cyane cyane mubushyuhe bwo hejuru kandi bwangirika cyane mubidukikije, nko kubika imyuka ya chimique (CVD) hamwe na plasma etching, igifuniko gishobora kubuza neza ubuso bwibikoresho kwangizwa nisuri yimiti cyangwa kwambara kumubiri, bityo bikongerera cyane ubuzima bwa serivisi ibikoresho no kugabanya igihe cyatewe no gusimburwa kenshi no gusana.
Kunoza ibikorwa byera:Mubikorwa byo gukora igice cya kabiri, kwanduza gato bishobora gutera ibicuruzwa. Imiti idahwitse ya Silicon Carbide Ceramic Coating ituma iguma ihagaze neza mubihe bikabije, ikabuza ibikoresho kurekura ibice cyangwa umwanda, bityo bigatuma ibidukikije bigira isuku. Ibi nibyingenzi byingenzi mubikorwa byo gukora bisaba ubwitonzi buhanitse hamwe nisuku ryinshi, nka PECVD hamwe no gutera ion.
Hindura uburyo bwo gucunga neza ubushyuhe:Mu gutunganya ubushyuhe bwo hejuru bwa semiconductor, nko gutunganya ubushyuhe bwihuse (RTP) hamwe na okiside, ubushyuhe bwinshi bwumuriro wa Silicon Carbide Ceramic Coating butuma ubushyuhe bumwe bukwirakwizwa mubikoresho. Ibi bifasha kugabanya imihangayiko yumuriro no guhindura ibintu biterwa nihindagurika ryubushyuhe, bityo bikazamura ibicuruzwa byakozwe neza kandi bihamye.
Shyigikira ibikorwa bigoye:Mubikorwa bisaba kugenzura ikirere kitoroshye, nkibikorwa bya ICP hamwe na PSS yo gutondeka, guhagarara no kurwanya okiside ya Silicon Carbide Ceramic Coating yemeza ko ibikoresho bikomeza imikorere ihamye mubikorwa byigihe kirekire, bikagabanya ibyago byo kwangirika kwibikoresho cyangwa kwangirika kwibikoresho bitewe ku bidukikije.
CVD SiC薄膜基本物理性能 Ibyingenzi bifatika bya CVD SiCgutwikira | |
性质 / Umutungo | 典型数值 / Agaciro gasanzwe |
晶体结构 / Imiterere ya Crystal | FCC β icyiciro多晶,主要为(111 )取向 |
密度 Ubucucike | 3.21 g / cm³ |
硬度 / Gukomera | 2500 维氏硬度( 500g umutwaro) |
晶粒大小 / Ibinyampeke SiZe | 2 ~ 10 mm |
纯度 / Ubuziranenge bwa Shimi | 99.99995% |
热容 / Ubushyuhe | 640 J · kg-1· K.-1 |
升华温度 / Ubushyuhe bwo hejuru | 2700 ℃ |
抗弯强度 / Imbaraga zoroshye | 415 MPa RT amanota 4 |
杨氏模量 / Modulus | 430 Gpa 4pt yunamye, 1300 ℃ |
导热系数 / ThermalImyitwarire | 300W · m-1· K.-1 |
热膨胀系数 Kwagura Ubushyuhe (CTE) | 4.5 × 10-6K-1 |
Murakaza neza cyane gusura uruganda rwacu, reka tuganire kubindi biganiro!