MOCVD Substrate Ubushyuhe, Ibikoresho byo gushyushya MOCVD

Ibisobanuro bigufi:

Ibikoresho bishyushya bya grafite bikoreshwa mu itanura ryubushyuhe bwo hejuru hamwe nubushyuhe bwageze kuri dogere 2200 ahantu hatuje na dogere 3000 muri gaze ya deoxidiside kandi yashyizwemo.
Ibintu nyamukuru biranga grafite:
1. Guhuza imiterere yubushyuhe.
2. Umuyoboro mwiza w'amashanyarazi n'umutwaro mwinshi w'amashanyarazi.
3. Kurwanya ruswa.
4. kutaboneka.
5. Ubuziranenge bwimiti.
6. Imbaraga zikomeye.
Ibyiza ni ingufu zikoresha ingufu, agaciro gakomeye no kubungabunga bike.
Turashobora kubyara anti-okiside hamwe nigihe kirekire cyo kubaho grafite ingirakamaro, ibishushanyo mbonera hamwe nibice byose byashyushye.
Ibipimo nyamukuru byubushyuhe bwa grafite:

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Ibicuruzwa birambuye

Ibicuruzwa

MOCVD Substrate Heater, Ibikoresho byo Gushyushya MOCVD,
igishushanyo mbonera, umushyushya, MOCVD Substrate Heater,

Ubuzima burebure SIC Coated Graphite Heater ya MOCVD K465i

Uwitekaigishushanyo mboneraibice bikoreshwa mu itanura ryubushyuhe bwo hejuru hamwe nubushyuhe bwageze kuri dogere 2200 mubidukikije bya vacuum na dogere 3000 murwego rwa gaze ya gaze kandi yashizwemo.
Ibyingenzi byingenzi byaigishushanyo mbonera:
1. Guhuza imiterere yubushyuhe.
2. Umuyoboro mwiza w'amashanyarazi n'umutwaro mwinshi w'amashanyarazi.
3. Kurwanya ruswa.
4. kutaboneka.
5. Ubuziranenge bwimiti.
6. Imbaraga zikomeye.
Ibyiza ni ingufu zikoresha ingufu, agaciro gakomeye no kubungabunga bike.
Turashobora kubyara anti-okiside hamwe nigihe kirekire cyo kubaho grafite ingirakamaro, ibishushanyo mbonera hamwe nibice byose bya grafiteumushyushya.
Ibipimo nyamukuru bya grafiteumushyushya:

Ibisobanuro bya tekiniki	VET-M3
Ubucucike bwinshi (g / cm3)	851.85
Ibirimo ivu (PPM)	00500
Gukomera ku nkombe	≥45
Kurwanya Byihariye (μ.Ω.m)	≤12
Imbaraga zoroshye (Mpa)	≥40
Imbaraga Zikomeretsa (Mpa)	≥70
Icyiza. Ingano y'ibinyampeke (μm)	≤43
Coefficient yo Kwagura Ubushyuhe Mm / ° C.	≤4.4 * 10-6

Ubushyuhe bwa Graphite kumatanura yamashanyarazi bufite imiterere yo kurwanya ubushyuhe, kurwanya okiside, gukoresha amashanyarazi neza nubukanishi bwiza. Turashobora gukora imashini zitandukanye zishyushya grafite dukurikije igishushanyo cyabakiriya.

Ubuzima burebure SIC Coated Graphite Heater ya MOCVD K465i