6 Inch Semi Ihinduranya SiC Wafer iva muri VET Ingufu nigisubizo cyambere kubikorwa byingufu nyinshi kandi zikoresha inshuro nyinshi, bitanga ubushyuhe bwumuriro nubushakashatsi bwamashanyarazi. Izi waferi zikoresha igice cya ngombwa ni ngombwa mugutezimbere ibikoresho nka amplifier ya RF, amashanyarazi, nibindi bikoresho bikoresha ingufu nyinshi. Ingufu za VET zitanga ubuziranenge nuburyo bukora neza, bigatuma iyi wafer iba nziza muburyo butandukanye bwo guhimba igice cya kabiri.
Usibye imitungo yabo idasanzwe yo kubika, aba wafers ba SiC bahujwe nibikoresho bitandukanye birimo Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, na Epi Wafer, bigatuma bihinduka muburyo butandukanye bwo gukora. Byongeye kandi, ibikoresho bigezweho nka Gallium Oxide Ga2O3 na AlN Wafer birashobora gukoreshwa bifatanije niyi waferi ya SiC, bigatanga nuburyo bworoshye mubikoresho bya elegitoroniki bifite ingufu nyinshi. Wafers yagenewe guhuza hamwe na sisitemu isanzwe ikora inganda nka sisitemu ya Cassette, bigatuma byoroha gukoreshwa mubikorwa rusange.
VET Ingufu zitanga portfolio yuzuye ya semiconductor substrates, harimo Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, Gallium Oxide Ga2O3, na AlN Wafer. Ibicuruzwa byacu bitandukanye bitandukanye byujuje ibyifuzo bya elegitoroniki zitandukanye, kuva amashanyarazi ya elegitoronike kugeza kuri RF na optoelectronics.
Ibice 6 bya santimetero imwe ya SiC wafer itanga ibyiza byinshi:
Umuvuduko mwinshi wo kumeneka: Umuyoboro mugari wa SiC utuma imbaraga zo kumeneka hejuru, zitanga ibikoresho byinshi kandi byoroshye.
Igikorwa cy'ubushyuhe bwo hejuru: SiC nziza cyane yubushyuhe butuma ikora mubushyuhe bwo hejuru, igateza imbere ibikoresho.
Kurwanya ubukana buke: Ibikoresho bya SiC byerekana imbaraga nke zo kurwanya, kugabanya gutakaza ingufu no kuzamura ingufu.
VET Ingufu zitanga waferi yihariye ya SiC kugirango ihuze ibyifuzo byawe byihariye, harimo ubunini butandukanye, urwego rwa doping, hamwe nubuso burangirira. Itsinda ryinzobere zacu ritanga inkunga ya tekiniki na nyuma yo kugurisha kugirango tumenye neza.
KUBONA UMWIHARIKO
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
TTV (GBIR) | ≤6um | ≤6um | |||
Umuheto (GF3YFCD) -Agaciro keza | ≤15μm | ≤15μm | ≤25μm | ≤15μm | |
Intambara (GF3YFER) | ≤25μm | ≤25μm | ≤40μm | ≤25μm | |
LTV (SBIR) -10mmx10mm | <2 mm | ||||
Wafer Edge | Beveling |
BURUNDU
* n-Pm = n-ubwoko bwa Pm-Urwego, n-Ps = n-ubwoko bwa Ps-Urwego, Sl = Semi-lnsulating
Ingingo | 8-Inch | 6-Inch | 4-Inch | ||
nP | n-Pm | n-Zab | SI | SI | |
Kurangiza | Impande ebyiri Optical Polonye, Si- Isura CMP | ||||
Ubuso | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Isura Ra≤0.2nm | |||
Imipira | Nta na kimwe cyemewe (uburebure n'ubugari≥0.5mm) | ||||
Ibimenyetso | Nta na kimwe cyemewe | ||||
Igishushanyo (Si-Isura) | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | Qty.≤5, Guhuriza hamwe | ||
Ibice | Nta na kimwe cyemewe | ||||
Guhezwa | 3mm |