High Purity CVD Solid SiC Bulk

Kufotokozera Kwachidule:

Kukula kofulumira kwa makhiristo amodzi a SiC pogwiritsa ntchito magwero ochulukirapo a CVD-SiC (Chemical Vapor Deposition - SiC) ndi njira yodziwika bwino yokonzekera zida zapamwamba za SiC single crystal. Makhiristo amodziwa amatha kugwiritsidwa ntchito pazinthu zosiyanasiyana, kuphatikiza zida zamagetsi zamagetsi, zida za optoelectronic, masensa, ndi zida za semiconductor.

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Tsatanetsatane wa Zamalonda

Zolemba Zamalonda

VET Energy imagwiritsa ntchito chiyero chapamwamba kwambirisilicon carbide (SiC)kupangidwa ndi kuyika kwa nthunzi wa mankhwala(CVD)monga gwero la zinthu zakukulaSiC makristasindi physical vapor transport (PVT). Mu PVT, zinthu zoyambira zimayikidwa mu acruciblendi sublimated pa kristalo mbewu.

Pamafunika chiyero chapamwamba kuti chipangidwe chapamwambaSiC makristasi.

VET Energy imagwira ntchito popereka SiC yayikulu ya PVT chifukwa imakhala ndi kachulukidwe kakang'ono kuposa tinthu ting'onoting'ono tomwe timapangidwa ndi kuyaka kochitika kwa Si ndi mpweya wokhala ndi C. Mosiyana ndi sintering-gawo lolimba kapena momwe Si ndi C amachitira, sizifuna ng'anjo yodzipatulira kapena sitepe yowononga nthawi mu ng'anjo yakukula. Zinthu zazikuluzikuluzi zimakhala ndi kuchuluka kwa evaporation nthawi zonse, zomwe zimapangitsa kuti magwiridwe antchito azifanana.

Chiyambi:
1. Konzani gwero la block CVD-SiC: Choyamba, muyenera kukonzekera gwero la block block la CVD-SiC, lomwe nthawi zambiri limakhala loyera komanso lolimba kwambiri. Izi zitha kukonzedwa ndi njira ya Chemical vapor Deposition (CVD) pansi pamikhalidwe yoyenera.

2. Kukonzekera kwa gawo lapansi: Sankhani gawo lapansi loyenera ngati gawo la SiC single crystal kukula. Zida zomwe zimagwiritsidwa ntchito nthawi zambiri zimaphatikizapo silicon carbide, silicon nitride, ndi zina, zomwe zimafanana bwino ndi SiC single crystal yomwe ikukula.

3. Kutentha ndi kutentha: Ikani gwero la block CVD-SiC ndi gawo lapansi mu ng'anjo yotentha kwambiri ndikupereka mikhalidwe yoyenera. Sublimation imatanthawuza kuti pa kutentha kwakukulu, gwero la chipika limasintha mwachindunji kuchoka ku cholimba kupita ku nthunzi, ndiyeno imakhazikikanso pamtunda wapansi kuti apange kristalo imodzi.

4. Kutentha kwa kutentha: Panthawi ya sublimation, kutentha kwa kutentha ndi kugawa kwa kutentha kumafunika kuyendetsedwa bwino kuti kulimbikitsa kutsika kwa gwero la block ndi kukula kwa makhiristo amodzi. Kuwongolera kutentha koyenera kumatha kukwaniritsa mtundu wabwino wa kristalo ndi kukula kwake.

5. Kuwongolera kwamlengalenga: Panthawi ya sublimation, mlengalenga momwemonso iyenera kuyendetsedwa. Mpweya woyeretsedwa kwambiri (monga argon) nthawi zambiri umagwiritsidwa ntchito ngati mpweya wonyamulira kuti ukhalebe ndi mphamvu yoyenera komanso yoyera komanso kupewa kuipitsidwa ndi zonyansa.

6. Kukula kwa kristalo imodzi: Gwero la CVD-SiC chipika limadutsa kusintha kwa nthunzi panthawi ya sublimation ndikubwezeretsanso pa gawo lapansi kuti likhale limodzi la kristalo. Kukula kofulumira kwa makhiristo amodzi a SiC kumatha kutheka kudzera mumikhalidwe yoyenera yocheperako komanso kuwongolera kutentha.