Epitaxial Epi Graphite Barrel Susceptor

Epitaxial Epi Graphite Barrel Susceptor

Epitaxial Epi Graphite Barrel Susceptorndi chipangizo chothandizira ndi chotenthetsera chopangidwa mwapadera chomwe chimagwiritsidwa ntchito kusunga ndi kutentha magawo a semiconductor panthawi yopanga monga Deposition kapena Epitaxy process.

Kapangidwe kake kamakhala ndi cylindrical kapena mbiya pang'ono, pamwamba pake imakhala ndi matumba angapo kapena nsanja zoyikamo zowotcha, zimatha kukhala zolimba kapena zopanda pake, kutengera njira yotenthetsera.

Ntchito zazikulu za epitaxial barrel susceptor:

Thandizo la substrate: imagwira motetezeka ma semiconductor angapo;
- Gwero la kutentha: limapereka kutentha kwakukulu komwe kumafunikira kukula kudzera mu kutentha;
-Kutentha kofanana: kumatsimikizira kutentha kofanana kwa magawo;
-Kuzungulira: Nthawi zambiri imazungulira pakukula kuti ipititse patsogolo kutentha ndi kugawa gasi mofanana.

Mfundo yogwiritsira ntchito Epi graphite barrel susceptor:
- Mu epitaxial riyakitala, chowotchera mbiya chimatenthedwa mpaka kutentha kofunikira (nthawi zambiri 1000 ℃-1200 ℃ ya silicon epitaxy);
-Mtsuko wa mbiya umazungulira kuti uwonetsetse kutentha kofanana ndi kutuluka kwa gasi;
-Mipweya yowonongeka imawola pa kutentha kwakukulu, kupanga zigawo za epitaxial pamtunda wapansi.

Mapulogalamu:
- Amagwiritsidwa ntchito makamaka pakukula kwa silicon epitaxial
-Imagwiranso ntchito pa epitaxy ya zida zina za semiconductor monga GaAs, InP, etc.

VET Energy imagwiritsa ntchito graphite yoyera kwambiri yokhala ndi zokutira za CVD-SiC kuti zithandizire kukhazikika kwamankhwala:

Ubwino wa VET Energy Epitaxial Epi Graphite Barrel Susceptor:

- High kutentha bata;
- Good matenthedwe kufanana;
-Imatha kukonza magawo angapo nthawi imodzi, kuwongolera magwiridwe antchito;
-Chemical inert, kusunga malo omwe amakula kwambiri.