Wafer susceptor nwere mkpuchi TaC maka G5 G10

Nkọwa dị mkpirikpi:

VET Energy Wafer susceptor nwere mkpuchi TaC maka G5 G10 bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.


Nkọwa ngwaahịa

Mkpado ngwaahịa

Mkpuchi TaC bụ ụdị mkpuchi tantalum carbide (TaC) nke a kwadebere site na teknụzụ ntinye ikuku anụ ahụ, ọ nwere njirimara ndị a:

1. High hardness: TaC mkpuchi ike dị elu, na-emekarị nwere ike iru 2500-3000HV, bụ ihe mkpuchi siri ike magburu onwe ya.

2. Yiri nkwụsi ike: mkpuchi TaC na-eguzogide nke ukwuu, nke nwere ike ibelata mmebi na mmebi nke akụkụ igwe n'oge eji.

3. Ezigbo nguzogide okpomọkụ dị elu: mkpuchi TaC nwekwara ike ịnọgide na-arụ ọrụ ya dị mma n'okpuru ọnọdụ okpomọkụ dị elu.

4. Nkwụsi ike nke kemịkal dị mma: mkpuchi TaC nwere ezigbo nkwụsi ike nke kemịkalụ ma nwee ike iguzogide ọtụtụ mmeghachi omume kemịkal, dị ka acids na bases.

Mkpuchi TaC16
6 (1)

碳化钽涂层物理特性物理特性

Njirimara anụ ahụ nke TaC mkpuchi

密度/ Njupụta

14.3 (g/cm³)

比辐射率 / Mgbapụta pụrụ iche

0.3

热膨胀系数 / Ọnụ ọgụgụ mgbasawanye okpomọkụ

6.3 10-6/K

努氏硬度/ Isi ike (HK)

2000 HK

电阻 / Nguzogide

1 × 10-5 Ohm*cm

热稳定性 / Thermal kwụsie ike

<2500 ℃

石墨尺寸变化 / Mgbanwe nha eserese

-10 ~ -20 nkeji

涂层厚度 / mkpuchi ọkpụrụkpụ

≥20um ahụkarị uru (35um± 10um)

 

Ningbo VET Energy Technology Co., Ltd bụ ụlọ ọrụ teknụzụ dị elu na-elekwasị anya na mmepụta na ahịa nke ihe dị elu dị elu, ihe na teknụzụ na-ekpuchi graphite, silicon carbide, ceramics, ọgwụgwọ elu na ihe ndị ọzọ. A na-eji ngwaahịa ndị a eme ihe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.

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