CVD TaC mkpuchi efere susceptor

Nkọwa dị mkpirikpi:

VET Energy CVD TaC mkpuchi efere susceptor bụ ngwaahịa na-arụ ọrụ dị elu emebere iji nye arụmọrụ na-agbanwe agbanwe na ntụkwasị obi ruo ogologo oge. Ọ nwere oke okpomọkụ dị mma na ịdị n'otu okpomọkụ, ịdị ọcha dị elu, nkwụsị nke mbuze, na-eme ka ọ bụrụ ngwọta zuru oke maka ngwa nhazi wafer.


Nkọwa ngwaahịa

Mkpado ngwaahịa

NkeCVD TaC kpuchieEmebere Plate Susceptor sitere na vet-china maka ịrụ ọrụ dị elu n'ime usoro ikuku vapor (CVD). Susceptor a nwere ihe siri ikeTaC (Tantalum Carbide) mkpuchi, na-enye nkwụsi ike okpomọkụ pụrụ iche, nguzogide kemịkalụ, na ịdịte aka, na-eme ka ọ bụrụ ezigbo ngwọta maka nrụpụta semiconductor na ngwa okpomọkụ dị elu. NkeCVD TaC mkpuchina-eme ka ọ dị mma na-eguzogide oxidation na iyi, na-enye ohere ka onye na-ahụ maka ya nwee ike ịnọgide na-eguzosi ike n'ezi ihe na ịrụ ọrụ na gburugburu ebe dị njọ.

vet-ChinaCVD TaC kpuchiePlate Susceptor pụtara maka ikike ya ikesa ọkụ n'otu oge n'oge usoro CVD, na-ahụ na ntinye akwa oyi akwa na ịkwalite arụmọrụ nke nrụpụta semiconductor. Ihe mkpuchi Ta-C na-enye nchebe ọzọ megide corrosion kemịkalụ, na-agbatị ndụ ndụ nke onye susceptor na imeziwanye arụmọrụ n'ozuzu ya. Site na nchikota nke teknụzụ susceptor CVD dị elu na mkpuchi kemịkalụ TaC dị elu, nke a bụ ihe dị mkpa maka ụlọ ọrụ chọrọ nkenke na ntụkwasị obi na gburugburu oke okpomọkụ.

Ma ejiri ya na mmepụta nke semiconductors ma ọ bụ ngwa teknụzụ ndị ọzọ dị elu, nkeCVD TaC Ekpuchi Plate Susceptoremebere ya iji gboo ihe achọrọ nke nrụpụta ọgbara ọhụrụ. N'ịkwado aha Semicera maka mmepụta ọhụrụ na ịdị mma, ngwaahịa a na-enye arụmọrụ dị elu yana ịdịte aka na-adịte aka, na-eme ka ọ bụrụ nhọrọ ntụkwasị obi maka usoro CVD.

Mkpuchi TaC bụ ụdị mkpuchi tantalum carbide (TaC) nke a kwadebere site na teknụzụ ntinye ikuku anụ ahụ, ọ nwere njirimara ndị a:

1. High hardness: TaC mkpuchi ike dị elu, na-emekarị nwere ike iru 2500-3000HV, bụ ihe mkpuchi siri ike magburu onwe ya.

2. Yiri nkwụsi ike: mkpuchi TaC na-eguzogide nke ukwuu, nke nwere ike ibelata mmebi na mmebi nke akụkụ igwe n'oge eji.

3. Ezigbo nguzogide okpomọkụ dị elu: mkpuchi TaC nwekwara ike ịnọgide na-arụ ọrụ ya dị mma n'okpuru ọnọdụ okpomọkụ dị elu.

4. Nkwụsi ike nke kemịkal dị mma: mkpuchi TaC nwere ezigbo nkwụsi ike nke kemịkalụ ma nwee ike iguzogide ọtụtụ mmeghachi omume kemịkal, dị ka acids na bases.

Mkpuchi TaC13
Mkpuchi TaC10

碳化钽涂层物理特性物理特性

Njirimara anụ ahụ nke TaC mkpuchi

密度/ Njupụta

14.3 (g/cm³)

比辐射率 / Mgbapụta pụrụ iche

0.3

热膨胀系数 / Ọnụ ọgụgụ mgbasawanye okpomọkụ

6.3 10-6/K

努氏硬度/ Isi ike (HK)

2000 HK

电阻 / Nguzogide

1 × 10-5 Ohm*cm

热稳定性 / Thermal kwụsie ike

<2500 ℃

石墨尺寸变化 / Mgbanwe nha eserese

-10 ~ -20 nkeji

涂层厚度 / mkpuchi ọkpụrụkpụ

≥20um ahụkarị uru (35um± 10um)

Ningbo VET Energy Technology Co., Ltd bụ ụlọ ọrụ teknụzụ dị elu na-elekwasị anya na mmepụta na ahịa nke ihe dị elu dị elu, ihe na teknụzụ na-ekpuchi graphite, silicon carbide, ceramics, ọgwụgwọ elu na ihe ndị ọzọ. A na-eji ngwaahịa ndị a eme ihe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.

Anyị ọrụ otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

Ji obi ụtọ nabata gị ileta ụlọ ọrụ anyị, ka anyị nwee mkparịta ụka ọzọ!

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