Tantalum carbide kpuchie susceptor maka wafer

Tantalum carbide mkpuchi mkpuchi maka onyonyo egosipụtara wafer

Nkọwa dị mkpirikpi:

Semicera bụ onye ndu na teknụzụ nchekwa ihe mkpuchi dị elu yana anyị nwere mpako iwebata ngwaahịa mkpuchi CVD Tantalum Carbide (TaC) iji nye nchekwa nchekwa dị elu maka nchekwa graphite gị.Graphite bụ ezigbo ihe na-eguzogide okpomọkụ dị elu, ma ọ na-adịkarị mfe oxidation na okpomọkụ dị elu, nke a na-apụghị izere kpamkpam ọbụna n'ime ọkụ ọkụ.Ihe mkpuchi CVD Tantalum Carbide (TaC) nwere ike igbochi oxidation nke mkpụrụ graphite nke ọma ma na-ejigide arụmọrụ ya dị elu nke ọma.TaC bụkwa ihe na-adịghị arụ ọrụ nke nwere ike iguzogide mmeghachi omume na gas dị ka argon na hydrogen.Gaa na Semicera taa ka ịmatakwu banyere Tantalum Carbide CVD mkpuchi EPI susceptors iji hụ na nkwụsi ike na ntụkwasị obi nke ngwa okpomọkụ gị dị elu.

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Mkpuchi TaC bụ ụdị mkpuchi tantalum carbide (TaC) nke a kwadebere site na teknụzụ ntinye ikuku anụ ahụ, ọ nwere njirimara ndị a:

1. High hardness: TaC mkpuchi ike dị elu, na-emekarị nwere ike iru 2500-3000HV, bụ ihe mkpuchi siri ike magburu onwe ya.

2. Yiri nkwụsi ike: mkpuchi TaC na-eguzogide nke ukwuu, nke nwere ike ibelata mmebi na mmebi nke akụkụ igwe n'oge eji.

3. Ezigbo nguzogide okpomọkụ dị elu: mkpuchi TaC nwekwara ike ịnọgide na-arụ ọrụ ya dị mma n'okpuru ọnọdụ okpomọkụ dị elu.

4. Nkwụsi ike nke kemịkal dị mma: mkpuchi TaC nwere ezigbo nkwụsi ike nke kemịkalụ ma nwee ike iguzogide ọtụtụ mmeghachi omume kemịkal, dị ka acids na bases.

Tantalum Carbide CVD mkpuchi EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Njirimara anụ ahụ nke TaC mkpuchi
密度/ Njupụta	14.3 (g/cm³)
比辐射率 / Mgbapụta pụrụ iche	0.3
热膨胀系数 / Ọnụ ọgụgụ mgbasawanye okpomọkụ	6.3 10^-6/K
努氏硬度/ Isi ike (HK)	2000 HK
电阻 / Nguzogide	1 × 10^-5 Ohm*cm
热稳定性 / Thermal kwụsie ike	<2500 ℃
石墨尺寸变化 / Mgbanwe nha eserese	-10 ~ -20 nkeji
涂层厚度 / mkpuchi ọkpụrụkpụ	≥20um ahụkarị uru (35um± 10um)

Ningbo VET Energy Technology Co., Ltd bụ ụlọ ọrụ teknụzụ dị elu na-elekwasị anya na mmepụta na ahịa nke ihe dị elu dị elu, ihe na teknụzụ na-ekpuchi graphite, silicon carbide, ceramics, ọgwụgwọ elu na ihe ndị ọzọ.A na-eji ngwaahịa ndị a eme ihe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.

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