Ndị SinteredSilicon Carbide (SiC)Crystal/Ụgbọ mmiri Waferemebere ya maka mkpa siri ike nke ụlọ ọrụ semiconductor na microelectronics. Ọ na-enye ikpo okwu echekwara maka ijikwa kristal silicon na wafers n'oge nhazi oke okpomọkụ, na-ahụ na a na-edobe iguzosi ike n'ezi ihe na ịdị ọcha ha niile.
Atụmatụ igodo
- Nkwụsi ike Thermal pụtara ìhè: Ike na-edi okpomọkụ ruo 1600 ° C, dị mma maka usoro na-achọ kpọmkwem njikwa okpomọkụ.
- Nguzogide kemịkalụ kacha elu: Na-eguzogide ọtụtụ kemịkalụ na gas na-emebi emebi, na-enye ogologo oge na gburugburu ebe nhazi siri ike.
- Ike Mechanical siri ike: Na-edobe iguzosi ike n'ezi ihe n'okpuru nrụgide dị elu, na-ebelata ohere nke nrụrụ ma ọ bụ nkwụsị.
- Mgbasawanye okpomọkụ kacha nta: Ezubere iji belata ihe egwu nke ujo na mgbawa, na-enye arụmọrụ a pụrụ ịdabere na ya karịa iji ogologo oge.
- Nrụpụta nkenke: Emebere ya na nkenke dị elu iji zute usoro achọrọ ma nabata nha kristal na wafer dị iche iche.
Ngwa
• Semiconductor wafer nhazi
• LED n'ichepụta
• mmepụta cell fotovoltaic
• Sistemu ikuku ikuku (CVD).
• Nnyocha na mmepe na sayensị ihe onwunwe
| 烧结碳化硅物理特性 Njirimara anụ ahụ nkeSnwere mmasịSakara ngosiCkpebisie ike | |
| 性质 / Ihe onwunwe | 典型数值 / Uru a na-ahụkarị |
| 化学成分 / ChemicalIhe mejupụtara | SiC> 95%, Si <5% |
| 体积密度 / Njupụta nnukwu | > 3.07 g/cm³ |
| 显气孔率/ O doro anya na porosity Porosity pụtara | <0.1% |
| 常温抗弯强度/ Modul nke mgbawa na 20 ℃ | 270 MPa |
| 高温抗弯强度/ Modul nke mgbawa na 1200 ℃ | 290MPa |
| 硬度/ Isi ike na 20 ℃ | 2400kg/mm² |
| 断裂韧性/ Mgbaji siri ike na 20% | 3.3MPa · m1/2 |
| 导热系数/ Thermal Conductivity na 1200 ℃ | 45w/m .K |
| 热膨胀系数/ Mgbasa ọkụ na 20-1200 ℃ | 4.51 × 10-6/ ℃ |
| 最高工作温度/ Max.arụ ọrụ okpomọkụ | 1400 ℃ |
| 热震稳定性/ Thermal ujo eguzogide na 1200 ℃ | Ọ dị mma |
Kedu ihe kpatara ịhọrọ Silicon Carbide Sintered (SiC) Crystal / Wafer Boat?
Ịhọrọ ụgbọ mmiri SiC Crystal / Wafer pụtara ịhọrọ maka ntụkwasị obi, arụmọrụ, na ogologo ndụ. Ụgbọ mmiri ọ bụla na-enweta usoro nchịkwa siri ike iji hụ na ọ na-agbaso ụkpụrụ kachasị elu nke ụlọ ọrụ ahụ. Ngwaahịa a abụghị naanị ịkwalite nchekwa na nrụpụta nke usoro nrụpụta gị kamakwa na-ekwe nkwa ịdị mma nke kristal silicon na wafers gị na-agbanwe agbanwe. Site na ụgbọ mmiri SiC Crystal/Wafer anyị, ị nwere ike ịtụkwasị obi na ngwọta na-akwado ịdịmma arụmọrụ gị.
