Nkwakọ ngwaahịa ọkwa fan out wafer (FOWLP) bụ ụzọ dị ọnụ ahịa na ụlọ ọrụ semiconductor. Mana mmetụta ndị na-ahụkarị nke usoro a bụ ịgbagha na mgbawa mgbawa. N'agbanyeghị ọganihu na-aga n'ihu nke ọkwa wafer na ọkwa panel fan si teknụzụ, okwu ndị a metụtara ịkpụzi ka dị.
Warping na-ebute site na mbelata kemịkalụ nke mmiri mkpakọ ịkpụzi ogige (LCM) n'oge ọgwụgwọ na jụrụ mgbe ịkpụzi. Ihe nke abụọ kpatara ịlụ ọgụ bụ enweghị nkwekọ na ọnụọgụ nke mgbasawanye thermal (CTE) n'etiti mgbawa silicon, ihe ịkpụzi, na mkpụrụ. Nkwụsị bụ n'ihi na ihe na-akpụzi viscous nwere ọdịnaya dị elu nwere ike iji naanị n'okpuru nnukwu okpomọkụ na nrụgide dị elu. Dị ka mgbawa na-edozi ya na onye na-ebu ya site na njikọ nwa oge, ịba ụba okpomọkụ ga-eme ka ntanye ahụ dị nro, si otú ahụ na-ebelata ike nrapado ya ma belata ike ya iji dozie mgbawa ahụ. Ihe nke abụọ kpatara nkwụsị ahụ bụ na nrụgide a chọrọ maka ịkpụzi na-emepụta nrụgide na mgbawa ọ bụla.
Iji chọta azịza nye ihe ịma aka ndị a, DELO duziri ọmụmụ ihe enwere ike ime site na ijikọ mgbawa analọg dị mfe na onye na-ebu ya. N'ihe gbasara ntọlite , a na-ekpuchi wafer nke na-ebu ya na nrapado njikọ nwa oge, a na-etinyekwa mgbawa ahụ ihu ala. Mgbe nke ahụ gasịrị, a na-akpụzi wafer ahụ site na iji nkpuchi DELO dị ala wee gwọọ ya na radieshon ultraviolet tupu iwepu wafer nke ebu. N'ime ngwa ndị dị otú ahụ, a na-ejikarị ihe mgbagwoju anya na-emepụta viscosity thermosetting.
DELO tụnyere warpage nke thermosetting ịkpụzi ihe na UV gwọrọ ngwaahịa na nnwale, na pụta gosiri na-ahụkarị ịkpụzi ihe ga-gbaruo n'oge jụrụ oge mgbe thermosetting. Ya mere, iji ụlọ okpomọkụ ultraviolet ọgwụgwọ kama ikpo ọkụ ọgwụgwọ nwere ike ibelata mmetụta nke mgbasawanye okpomọkụ adịghị ekwekọ n'etiti ogige ịkpụzi na ụgbọelu, si otú ibelata agha ruo n'ókè kasị ukwuu kwere omume.
Iji ihe eji agwọ ọrịa ultraviolet nwekwara ike ibelata ojiji nke ihe ndochi, si otú ahụ belata viscosity na modul nke Young. Viscosity nke nrapado ihe nlereanya ejiri na ule bụ 35000 mPa · s, na modul nke Young bụ 1 GPa. N'ihi enweghị ikpo ọkụ ma ọ bụ nrụgide dị elu na ihe a na-akpụzi, enwere ike ibelata mgbaka mgbawa ruo n'ókè kachasị ike. Ngwakọta ịkpụzi a na-ahụkarị nwere viscosity nke ihe dịka 800000 mPa · s yana modul nke ntorobịa n'ogo nke ọnụọgụ abụọ.
N'ozuzu, nyocha egosila na iji ihe ndị a gwọrọ UV maka ịkpụzi mpaghara buru ibu bara uru maka ịmepụta onye ndu mgbawa na-ekpochapụ ngwugwu ọkwa wafer, ebe ị na-ebelata warpage na mgbawa mgbawa ruo n'ókè kachasị ike. N'agbanyeghị nnukwu ọdịiche dị na ọnụọgụ mgbasawanye okpomọkụ n'etiti ihe eji eme ihe, usoro a ka nwere ọtụtụ ngwa n'ihi enweghị mgbanwe okpomọkụ. Na mgbakwunye, ọgwụgwọ UV nwekwara ike ibelata ọgwụgwọ oge na oriri ume.
UV kama ọgwụgwọ ọkụ na-ebelata warpage wee nwụọ na nkwakọ ngwaahịa ọkwa ọkwa wafer.
Ntụle nke wafers mkpuchi 12-inch na-eji ihe a gwọchara nke ọma, ihe dị elu (A) na ogige UV-gwọrọ (B)
Oge nzipu: Nov-05-2024