Dị ka egosiri n'elu, bụ ihe a na-ahụkarị
Nkeji nke mbụ:
Ihe na-ekpo ọkụ (ọkụ ọkụ): dị n'akụkụ ọkpọ ọkụ ọkụ, nke a na-ejikarị wires ndị na-eguzogide, na-eji ọkụ n'ime ọkụ ọkụ.
Quartz Tube: Isi nke ọkụ na-ekpo ọkụ na-ekpo ọkụ, nke ejiri quartz dị ọcha mee nke nwere ike iguzogide okpomọkụ dị elu ma nọgide na-enweghị ike.
Nri Gas: Dị n'elu ma ọ bụ n'akụkụ nke ọkụ ọkụ, a na-eji ya ebuga oxygen ma ọ bụ gas ndị ọzọ n'ime ime ọkụ ọkụ.
SS Flange: ihe ndị na-ejikọta tubes quartz na ahịrị gas, na-eme ka njigide na nkwụsi ike nke njikọ ahụ.
Ahịrị Nri Gas: Ọkụ na-ejikọ MFC na ọdụ ụgbọ mmiri gas maka nnyefe gas.
MFC (Mass Flow Controller): Ngwa nke na-achịkwa ikuku gas n'ime tube quartz iji mezie oke gas achọrọ.
Vent: A na-eji ikuku iyuzucha ikuku si n'ime tube ọkụ ahụ banye n'èzí akụrụngwa.
Akụkụ dị ala
Silicon Wafers na njide: A na-edobe wafer silicon n'ime ihe njide pụrụ iche iji hụ na otu okpomọkụ n'oge oxidation.
Njide Wafer: A na-ejiji silicon wafer wee hụ na wafer silicon ka kwụsiri ike n'oge usoro a.
Pedestal: Ihe owuwu nke na-ejide ihe mkpuchi silicon wafer, nke a na-ejikarị ihe na-eguzogide okpomọkụ dị elu.
Elevator: A na-eji ebuli ndị na-ejide Wafer n'ime ma pụta n'ime tubes quartz maka ntinye akpaaka na mbupu nke wafer silicon.
Robot Nyefee Wafer: nke dị n'akụkụ ngwaọrụ tube ọkụ ọkụ, a na-eji ya na-ewepụ ngwa ngwa silicon wafer na igbe ma tinye ya na tube ọkụ, ma ọ bụ wepụ ya mgbe nhazi ya.
Nchekwa Cassette Carousel: A na-eji carousel nchekwa cassette na-echekwa igbe nwere wafer silicon na enwere ike ịtụgharị maka ịnweta robot.
Wafer Cassette: A na-eji cassette wafer na-echekwa ma bufee wafer silicon ka a hazie ya.
Oge nzipu: Eprel-22-2024