A na-akọwa usoro dị n'ime nke akụrụngwa tube ọkụ ọkụ n'ụzọ zuru ezu

Dị ka egosiri n'elu, bụ ihe a na-ahụkarị

Nkeji nke mbụ:

▪ Ihe na-ekpo ọkụ (ọkụ ọkụ):

dị n'akụkụ ọkpọ ọkụ ọkụ, nke a na-ejikarị wires ndị na-eguzogide, na-ekpo ọkụ n'ime ọkụ ọkụ.

▪ Tube Quartz:

Isi nke ọkụ oxidation na-ekpo ọkụ, nke ejiri quartz dị ọcha mee nke nwere ike iguzogide okpomọkụ dị elu ma nọgide na-enweghị ike.

▪ Ihe oriri gas:

N'ịbụ nke dị n'elu ma ọ bụ akụkụ nke tube ọkụ ọkụ, a na-eji ya ebuga oxygen ma ọ bụ gas ndị ọzọ n'ime ime ọkụ ọkụ.

▪ Flange SS:

ihe ndị na-ejikọta tubes quartz na eriri gas, na-eme ka njigide na nkwụsi ike nke njikọ ahụ.

▪ Ahịrị nri gas:

Ọkụ na-ejikọta MFC na ọdụ ụgbọ mmiri maka nnyefe gas.

▪ MFC (Onye na-ahụ maka Flow Mass):

Ngwaọrụ na-achịkwa ikuku gas n'ime tube quartz iji mezie oke gas achọrọ.

▪ Ikuku:

A na-eji ikuku iyuzucha ikuku si n'ime tube ọkụ ahụ gaa n'èzí akụrụngwa.

Akụkụ ala:

▪ Silicon Wafers na Njide:

A na-edobe wafer silicon n'ime ihe njide pụrụ iche iji hụ na otu okpomọkụ dị n'oge oxidation.

▪ Njide Wafer:

Ejiri ya jide wafer silicon ma hụ na wafer silicon na-anọgide na-akwụsi ike n'oge usoro ahụ.

▪ Ihe mgbakwasị ụkwụ:

Ihe owuwu nke na-ejide ihe njide silicon wafer, nke a na-ejikarị ihe na-eguzogide okpomọkụ dị elu.

▪ Igwe elu:

A na-eji ebuli ndị na-ejide Wafer n'ime ma pụta n'ime tubes quartz maka ntinye akpaaka na mbupu nke wafer silicon.

▪ Robot Nyefee Wafer:

dị n'akụkụ ngwaọrụ tube ọkụ ọkụ, a na-eji ya na-ewepu silicon wafer na-akpaghị aka na igbe ma tinye ya na tube ọkụ, ma ọ bụ wepụ ya mgbe nhazi ya.

▪ Carousel Nchekwa Cassette:

A na-eji carousel nchekwa cassette na-echekwa igbe nwere wafer silicon ma nwee ike ịtụgharị maka ịnweta robot.

▪ Kaseti Wafer:

A na-eji cassette wafer na-echekwa ma bufee wafer silicon ka a hazie ya.