Mmepụta ngwaọrụ semiconductor gụnyere ngwaọrụ pụrụ iche, sekit agbakwunyere na usoro nkwakọ ngwaahịa ha.
Enwere ike kewaa mmepụta semiconductor ụzọ atọ: mmepụta anụ ahụ, ngwaahịawafernrụpụta na mgbakọ ngwaọrụ. N'ime ha, mmetọ kachasị njọ bụ ọkwa nrụpụta wafer ngwaahịa.
A na-ekewakarị ihe ndị na-emerụ emerụ na mmiri mkpofu, gas na-ekpofu ihe na ihe mkpofu siri ike.
Usoro nrụpụta mgbawa:
Silicon wafermgbe a na-egweri mpụga - ihicha - oxidation - iguzogide otu - fotolithography - mmepe - etching - mgbasa, ntinye ion - nsị kemịkalụ - kemịkalụ n'ibu polishing - metallization, wdg.
Mmiri mkpofu
A na-emepụta nnukwu mmiri mkpofu na usoro ọ bụla nke nrụpụta semiconductor na nyocha nkwakọ ngwaahịa, ọkachasị mmiri mkpofu acid-base, mmiri ahịhịa nwere amonia na mmiri ahịhịa.
1. Mmiri mkpofu nwere fluorine:
Hydrofluoric acid na-aghọ ihe mgbaze bụ isi eji na oxidation na etching Filiks n'ihi na ya oxidizing na corrosive Njirimara. Fluorine nwere mmiri mkpofu na usoro a na-esite na usoro mgbasa ozi yana usoro nchacha kemịkalụ na usoro nrụpụta mgbawa. N'ime usoro nhicha nke silicon wafers na arịa ndị metụtara ya, a na-ejikwa hydrochloric acid ọtụtụ oge. A na-emecha usoro ndị a na tankị etching ma ọ bụ akụrụngwa ihicha, yabụ enwere ike ịwepu mmiri mkpofu nwere fluorine n'onwe ya. Dị ka ịta ahụhụ si kwuo, enwere ike kewaa ya na mmiri mkpofu nke nwere fluorine dị elu na mmiri mkpofu nke nwere amonia dị ala. N'ozuzu, ntinye nke mmiri mkpofu nke nwere amonia dị elu nwere ike iru 100-1200 mg / L. Ọtụtụ ụlọ ọrụ na-emegharị akụkụ a nke mmiri mkpofu maka usoro na-achọghị ogo mmiri dị elu.
2. Acid-base mmiri mkpofu:
Ihe fọrọ nke nta ka ọ bụrụ usoro ọ bụla na usoro nrụpụta sekit agbakwunyere chọrọ ka ihicha mgbawa ahụ. Ka ọ dị ugbu a, sulfuric acid na hydrogen peroxide bụ mmiri nhicha a na-ejikarị eme ihe na usoro nrụpụta sekit agbakwunyere. N'otu oge ahụ, a na-ejikwa reagents acid-base dị ka nitric acid, hydrochloric acid na mmiri amonia.
Mmiri mkpofu acid-base nke usoro nrụpụta na-esite na usoro nhicha na usoro nrụpụta mgbawa. N'ime usoro nkwakọ ngwaahịa, a na-emeso mgbawa ahụ na ngwọta acid-base n'oge electroplating na nyocha kemịkalụ. Mgbe ọgwụgwọ gasịrị, ọ dị mkpa ka a na-asacha ya na mmiri dị ọcha iji mepụta mmiri mkpofu na-asachapụ acid-base. Na mgbakwunye, a na-ejikwa reagents acid-base dị ka sodium hydroxide na hydrochloric acid n'ọdụ mmiri dị ọcha iji mee ka anion na resins cation dịghachi iji mepụta mmiri mkpofu na-emegharị acid-base. A na-emepụtakwa mmiri ọdụ ụgbọ mmiri n'oge usoro ịsacha gas mkpofu acid-base. N'ime ụlọ ọrụ na-emepụta sekit agbakwunyere, ọnụ ọgụgụ nke mmiri mkpofu acid-base buru oke ibu.
3. Mmiri mmiri ara ehi:
N'ihi usoro mmepụta dị iche iche, ọnụ ọgụgụ nke ihe ndị na-emepụta ihe na-emepụta ihe na-eme ihe na ụlọ ọrụ semiconductor dị nnọọ iche. Otú ọ dị, dị ka ndị na-ehicha ihe, organic solvents ka na-ejikarị na njikọ dị iche iche nke n'ichepụta nkwakọ. Ụfọdụ ihe mgbaze na-aghọ ihe na-agbapụta mmiri na-ekpofu ahịhịa.
4. Mmiri mkpofu ndị ọzọ:
Usoro etching nke usoro mmepụta semiconductor ga-eji nnukwu amonia, fluorine na mmiri dị ọcha dị elu maka nsị, si otú ahụ na-emepụta ihe na-eme ka mmiri na-ekpo ọkụ nke amonia nwere nnukwu ihe.
A chọrọ usoro electroplating na usoro nkwakọ ngwaahịa semiconductor. Ọ dị mkpa ka ihicha mgbawa ahụ ka emechara electroplating, na electroplating ihicha mmiri mkpofu ga-emepụta na usoro a. Ebe ọ bụ na a na-eji ụfọdụ ọla eme ihe na electroplating, a ga-enwe ion ion ígwè na electroplating ihicha mmiri mkpofu, dị ka lead, tin, disc, zinc, aluminum, wdg.
gas na-ekpofu ihe
Ebe ọ bụ na usoro semiconductor nwere nnukwu ihe achọrọ maka ịdị ọcha nke ime ụlọ ọrụ, a na-ejikarị ndị fan na-ewepụta ụdị gas mkpofu dị iche iche na-agbanwe n'oge usoro ahụ. Ya mere, ikuku gas na-ekpofu ihe na ụlọ ọrụ semiconductor na-eji nnukwu ikpo ọkụ na ntinye uche dị ala. A na-emegharịkwa ikuku gas na-ekpofu ahịhịa.
Enwere ike kewaa gas mkpofu ndị a ụzọ anọ: gas acidic, gas alkaline, organic waste gas na gas na-egbu egbu.
1. Acid-base gas mkpofu:
Gas mkpofu acid-base na-esite na mgbasa,CVD, CMP na etching usoro, nke na-eji acid-base ihicha ngwọta ihicha wafer.
Ka ọ dị ugbu a, ihe mgbaze a na-ejikarị eme ihe na usoro mmepụta semiconductor bụ ngwakọta nke hydrogen peroxide na sulfuric acid.
Gas na-ekpofu ihe na-emepụta na usoro ndị a gụnyere gas acidic dị ka sulfuric acid, hydrofluoric acid, hydrochloric acid, nitric acid na phosphoric acid, na alkaline gas bụ tumadi amonia.
2. Organic mkpofu gas:
Gas na-ekpofu ahịhịa na-esite na usoro dị ka fotolithography, mmepe, etching na mgbasa. N'ime usoro ndị a, a na-eji ngwọta organic (dị ka mmanya isopropyl) na-ehicha elu nke wafer, na gas na-ekpofu ihe na-emepụta site na volatilization bụ otu n'ime isi mmalite nke gas gas;
N'otu oge ahụ, fotoresist (photoresist) nke a na-eji eme ihe na fotolithography na etching nwere ihe ndị na-emepụta ihe na-emepụta ihe na-agbanwe agbanwe, dị ka butyl acetate, nke na-eme ka ikuku dị n'ime ikuku n'oge nhazi nhazi nke wafer, nke bụ isi ihe ọzọ na-emepụta gas n'efu.
3. gas na-egbu egbu egbu:
Gas na-egbu egbu na-esite na usoro dị ka kristal epitaxy, akọrọ etching na CVD. N'ime usoro ndị a, a na-eji ụdị gas pụrụ iche dị ọcha dị iche iche na-edozi wafer, dị ka silicon (SiHj), phosphorus (PH3), carbon tetrachloride (CFJ), borane, boron trioxide, wdg. Ụfọdụ pụrụ iche gas na-egbu egbu, asphyxiating na corrosive.
N'otu oge ahụ, na akọrọ etching na ihicha usoro mgbe chemical vapor deposition na semiconductor n'ichepụta, a nnukwu ego nke zuru oxide (PFCS) gas chọrọ, dị ka NFS, C2F & CR, C3FS, CHF3, SF6, wdg Ndị a perfluorinated ogige. nwee nnabata siri ike na mpaghara ọkụ infrared ma nọrọ na ikuku ruo ogologo oge. A na-ewerekarị ha dị ka isi mmalite nke mmetụta griin haus zuru ụwa ọnụ.
4. Usoro nkwakọ ngwaahịa mkpofu gas:
E jiri ya tụnyere usoro nrụpụta semiconductor, gas mkpofu nke usoro nkwakọ ngwaahịa semiconductor na-emepụta dịtụ mfe, ọkachasị gas acidic, resin epoxy na uzuzu.
A na-emepụta gas na-ekpofu acidic na usoro dị ka electroplating;
A na-emepụta gas na-ekpofu ihe na-eme achịcha na-eme ka mmiri sie ike mgbe a na-agbanye ngwaahịa na akara;
Igwe dicing na-emepụta gas mkpofu nwere uzuzu silicon n'oge usoro ịkpụ wafer.
Nsogbu mmetọ gburugburu ebe obibi
Maka nsogbu mmetọ gburugburu ebe obibi na ụlọ ọrụ semiconductor, isi nsogbu ndị a ga-edozi bụ:
· Nnukwu ihe ọkụkụ nke ikuku na-emetọ ikuku na ogige organic na-agbanwe agbanwe (VOCs) na usoro fotolithography;
· Mgbapụta nke ogige perfluorinated (PFCS) na etching plasma na usoro ntinye mmiri nke kemịkalụ;
· Ọnụ ọgụgụ buru ibu nke ike na mmiri na mmepụta na nchekwa nchekwa nke ndị ọrụ;
· Mwegharịgharị na nlekota mmetọ nke ngwaahịa;
· Nsogbu nke iji kemịkalụ dị ize ndụ na usoro nkwakọ ngwaahịa.
Mmepụta dị ọcha
Enwere ike imezi teknụzụ mmepụta ihe dị ọcha nke Semiconductor site na akụkụ nke akụrụngwa, usoro na njikwa usoro.
Ịkwalite akụrụngwa na ume
Nke mbụ, ịdị ọcha nke ihe kwesịrị ịchịkwa nke ọma iji belata iwebata ihe ndị na-adịghị ọcha na ụmụ irighiri ihe.
Nke abuo, okpomọkụ dị iche iche, nchọpụta ntanye, ịma jijiji, ọkụ eletrik dị elu na ule ndị ọzọ kwesịrị ime na ihe ndị na-abata ma ọ bụ ngwaahịa emechara ọkara tupu etinye ha n'ime mmepụta.
Na mgbakwunye, ịdị ọcha nke ihe inyeaka kwesịrị ịchịkwa nke ọma. Enwere ọtụtụ teknụzụ enwere ike iji maka mmepụta ike dị ọcha.
Welie usoro mmepụta ihe
Ụlọ ọrụ semiconductor n'onwe ya na-agbalịsi ike ibelata mmetụta ya na gburugburu ebe obibi site na nhazi teknụzụ usoro.
Dịka ọmụmaatụ, n'afọ ndị 1970, a na-ejikarị ihe ndị na-emepụta ihe na-emepụta ihe na-ehicha wafer na teknụzụ nhicha sekit agbakwunyere. N'ime 1980s, acid na alkali ngwọta dị ka sulfuric acid ka ejiri mee ihe na-ehicha wafers. Ruo n'afọ 1990, e mepụtara teknụzụ nhicha oxygen plasma.
N'ihe gbasara nkwakọ ngwaahịa, ọtụtụ ụlọ ọrụ na-eji teknụzụ electroplating ugbu a, nke ga-ebute mmetọ ọla dị arọ na gburugburu ebe obibi.
Otú ọ dị, nkwakọ ngwaahịa na Shanghai adịghịzi eji teknụzụ electroplating, n'ihi ya, ọ dịghị mmetụta nke arọ ọla na gburugburu ebe obibi. Enwere ike ịchọta na ụlọ ọrụ semiconductor na-eji nwayọọ nwayọọ na-ebelata mmetụta ya na gburugburu ebe obibi site na nhazi usoro na ngbanwe kemịkalụ na usoro mmepe nke ya, nke na-agbasokwa usoro mmepe zuru ụwa ọnụ ugbu a nke usoro ịkwado na mmepụta ngwaahịa dabere na gburugburu ebe obibi.
Ka ọ dị ugbu a, a na-emekwuwanye usoro nhazi mpaghara, gụnyere:
· Ndochi na mbelata nke gas ammonium PFCS niile, dị ka iji PFCs gas nwere mmetụta griin ha dị ala iji dochie gas na mmetụta griin ha dị elu, dị ka imeziwanye usoro nhazi na ibelata ọnụ ọgụgụ nke PFCS gas na-eji na usoro;
· Ịkwalite ihicha ọtụtụ-wafer na-ehicha otu-wafer iji belata ọnụ ọgụgụ nke kemịkalụ ihicha ihe eji eme ihe na nhazi.
Njikwa usoro siri ike:
a. Chọpụta akpaaka nke usoro mmepụta ihe, nke nwere ike ịghọta nhazi nhazi na mmepụta ogbe, ma belata ọnụ ọgụgụ njehie dị elu nke ọrụ ntuziaka;
b. Usoro ihe gburugburu ebe obibi dị oke ọcha, ihe dịka 5% ma ọ bụ ihe na-erughị nke mfu mkpụrụ bụ ndị mmadụ na gburugburu ebe obibi kpatara. Ultra-dị ọcha usoro gburugburu ebe obibi ihe tumadi na-agụnye ikuku ọcha, elu-ọcha mmiri, abịakọrọ ikuku, CO2, N2, okpomọkụ, iru mmiri, wdg The ịdị ọcha larịị nke a dị ọcha ogbako a na-emekarị tụrụ site kacha ọnụ ọgụgụ nke irighiri ekwe kwa unit olu. ikuku, ya bụ, urughuru ọnụ ịta;
c. Mee ka nchọpụta dị ike, ma họrọ isi ihe kwesịrị ekwesị maka nchọpụta na ebe ọrụ nwere nnukwu ihe mkpofu n'oge usoro mmepụta.
Nabata ndị ahịa ọ bụla si n'akụkụ ụwa niile ka ha bịa leta anyị maka mkparịta ụka ọzọ!
https://www.vet-china.com/
https://www.facebook.com/people/Ningbo-Miami-Advanced-Material-Technology-Co-Ltd/100085673110923/
https://www.linkedin.com/company/100890232/admin/page-posts/published/
https://www.youtube.com/@user-oo9nl2qp6j
Oge nzipu: Ọgọst-13-2024