Enwere ike ịkwado mkpuchi SiC site na ntinye mmiri nke vapor (CVD), mgbanwe precursor, spraying plasma, wdg. Ihe mkpuchi nke CHEMICAL vapor deposition kwadebere bụ otu na kọmpat, ma nwee ezigbo nhazi. Na-eji methyl trichlosilane. (CHzSiCl3, MTS) dị ka silicon isi iyi, SiC mkpuchi prepar ...
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