Okwu mmalite nke kemịkalụ vapor deposition (CVD) teknụzụ ntinye ihe nkiri dị mkpa

Mkpokọta vapor kemịkalụ (CVD) bụ teknụzụ ntinye ihe nkiri dị mkpa dị mkpa, nke a na-ejikarị akwadebe ihe nkiri na-arụ ọrụ dị iche iche na ihe ndị dị obere, a na-ejikwa ya na nrụpụta semiconductor na mpaghara ndị ọzọ.

1. Ụkpụrụ ọrụ nke CVD

N'ime usoro CVD, a na-ebute ihe nrịbama gas (otu ma ọ bụ karịa gaseous precursor compound) na kọntaktị na elu nke mkpụrụ osisi ma kpoo ọkụ na ụfọdụ okpomọkụ iji mee ka mmeghachi omume kemịkal na nkwụnye ego n'elu ala ahụ iji mepụta ihe nkiri ma ọ bụ mkpuchi achọrọ. oyi akwa. Ngwaahịa nke mmeghachi omume kemịkalụ a bụ ihe siri ike, na-abụkarị ngwakọta nke ihe a chọrọ. Ọ bụrụ na anyị chọrọ ịrapara silicon n'elu, anyị nwere ike iji trichlorosilane (SiHCl3) dị ka precursor gas: SiHCl3 → Si + Cl2 + HCl Silicon ga-ejikọta n'elu ihe ọ bụla ekpughere (ma n'ime ma n'èzí), mgbe chlorine na hydrochloric acid gases. a ga-ahapụ ya n'ọnụ ụlọ.

2. Nkewa CVD

Thermal CVD: Site na kpo oku precursor gas ka ire ere ma tinye ya n'elu ala. Plasma Enhanced CVD (PECVD): A na-agbakwunye Plasma na CVD thermal iji kwalite ọnụego mmeghachi omume na ịchịkwa usoro ntinye ego. Metal Organic CVD (MOCVD): Iji metal organic ogige dị ka precursor gas, mkpa fim nke ọla na semiconductor nwere ike kwadebere, na-ejikarị na-emepụta nke ngwaọrụ dị ka LED.

3. Ngwa

(1) Semiconductor mmepụta

Ihe nkiri silicide: a na-eji akwadebe ihe mkpuchi mkpuchi, ihe ndị na-emepụta ihe, ihe ndị dịpụrụ adịpụ, wdg Nitride film: eji kwadebe silicon nitride, aluminum nitride, wdg, eji na LEDs, ngwaọrụ ike, wdg Metal film: eji kwadebe conductive n'ígwé, metallized. akwa akwa, wdg.

(2) Ngosipụta teknụzụ

Ihe nkiri ITO: Ihe nkiri oxide na-eduzi transperent, nke a na-ejikarị na ngosipụta panel dị larịị na ihuenyo mmetụ aka. Ihe nkiri ọla kọpa: eji akwadebe akwa akwa akwa, ahịrị ndị na-eduzi, wdg, iji melite arụmọrụ nke ngwaọrụ ngosi.

(3) Ngalaba ndị ọzọ

Ihe mkpuchi anya: gụnyere mkpuchi mgbochi na-atụgharị uche, ihe nzacha anya, wdg. Mkpuchi mgbochi corrosion: ejiri akụkụ ụgbọ ala, ngwaọrụ ikuku, wdg.

4. Njirimara nke usoro CVD

Jiri gburugburu okpomọkụ dị elu iji kwalite ọsọ mmeghachi omume. A na-emekarị ya na gburugburu oghere. A ghaghị iwepụ ihe ndị na-emerụ emerụ n'elu akụkụ ahụ tupu eserese. Usoro a nwere ike ịnwe oke na ihe ndị nwere ike mkpuchi, ya bụ oke okpomọkụ ma ọ bụ mmachi mmeghari. Ihe mkpuchi CVD ga-ekpuchi akụkụ niile nke akụkụ ahụ, gụnyere eriri, oghere kpuru na ihe dị n'ime. Nwere ike kpachie ikike ikpuchi mpaghara ebumnuche akọwapụtara. A na-ejedebe ọkpụrụkpụ ihe nkiri site na usoro na ọnọdụ ihe. Adhesion kacha elu.