MOCVD Substrate Heater, Ihe Na-ekpo ọkụ Maka MOCVD

MOCVD Substrate Heater, ihe ndị na-ekpo ọkụ maka onyonyo egosipụtara MOCVD

Nkọwa dị mkpirikpi:

A na-eji ihe ndị na-ekpo ọkụ graphite na-ekpo ọkụ na ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na ebe oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.
Isi atụmatụ nke ikpo ọkụ graphite:
1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi-oxidation na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke ikpo ọkụ graphite.
Isi akụkụ nke ikpo ọkụ graphite:

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MOCVD Substrate Heater, Ihe ọkụ maka MOCVD,
graphite okpomọkụ, kpo oku, MOCVD Substrate Heater,

Ihe mkpuchi eserese eserese nke SIC dị ogologo maka MOCVD K465i

Nkegraphite okpomọkụA na-eji ihe ndị dị n'ime ọkụ ọkụ dị elu na okpomọkụ ruru ogo 2200 na gburugburu oghere na 3000 degrees na deoxidized na ntinye gas gburugburu.
Isi atụmatụ nkegraphite okpomọkụ:
1. uniformity nke kpo oku Ọdịdị.
2. ezigbo ọkụ eletrik na ibu eletrik dị elu.
3. nguzogide corrosion.
4. inoxidizability.
5. elu chemical ịdị ọcha.
6. ike n'ibu ike.
Ihe bara uru bụ ike ịrụ ọrụ nke ọma, uru dị elu na mmezi dị ala.
Anyị nwere ike ịmepụta mgbochi ọxịdashọn na ogologo ndụ ogologo oge graphite crucible, graphite ebu na akụkụ niile nke graphite.kpo oku.
Isi akụkụ nke graphitekpo oku:

Nkọwa nka nka	VET-M3
Njupụta buru ibu (g/cm3)	≥1.85
Ọdịnaya Ash (PPM)	≤500
Oke ike ike	≥45
Nguzogide akọwapụtara (μ.Ω.m)	≤12
Ike Flexural (Mpa)	≥40
Ike mkpakọ (Mpa)	≥70
Oke. Nha ọka (μm)	≤43
Ọnụọgụ nke Mgbasa ọkụ Mm/°C	≤4.4*10-6

Igwe ọkụ graphite maka ọkụ ọkụ eletrik nwere njirimara nke nguzogide okpomọkụ, nguzogide oxidation, ezigbo eletriki eletrik na ike nrụpụta ka mma. Anyị nwere ike igwe dị iche iche nke graphite kpo oku dị ka ndị ahịa si chepụta.

Ihe mkpuchi eserese eserese nke SIC dị ogologo maka MOCVD K465i