VET Energy na-eji ịdị ọcha dị oke elusilicon carbide (SiC)kpụrụ site kemịkalụ uzuoku ntinye(CVD)dị ka isi iyi ihe na-eto etoSiC kristalsite na njem ụgbọ elu anụ ahụ (PVT). Na PVT, a na-ebuba ihe isi mmalite n'ime acruciblema tinye ya na kristal mkpụrụ.
A chọrọ isi iyi dị ọcha dị elu iji mepụta mma dị eluSiC kristal.
VET Energy pụrụ iche n'inye nnukwu urughuru SiC maka PVT n'ihi na ọ nwere njupụta dị elu karịa obere urughuru ihe kpụrụ site na ọkụ ọkụ nke Si na C-nwere gas. N'adịghị ka singing siri ike ma ọ bụ mmeghachi omume nke Si na C, ọ dịghị achọ ọkụ ọkụ nke raara onwe ya nye ma ọ bụ nzọụkwụ na-ewe oge n'ime ọkụ ọkụ na-eto eto. Nke a nnukwu-urughi uru nwere ihe fọrọ nke nta ka ọ bụrụ mgbe nile ọnụ ọgụgụ evaporation, nke na-eme ka ọsọ-na-agba ọsọ uniformity.
Okwu mmalite:
1. Kwadebe CVD-SiC ngọngọ isi iyi: Nke mbụ, ịkwesịrị ịkwadebe ebe nchekwa CVD-SiC dị elu, nke na-abụkarị ịdị ọcha na njupụta dị elu. Enwere ike ịkwado nke a site na usoro ntinye mmiri mmiri (CVD) n'okpuru ọnọdụ mmeghachi omume kwesịrị ekwesị.
2. Nkwadebe mkpụrụ: Họrọ mkpụrụ kwesịrị ekwesị dị ka mkpụrụ maka SiC otu uto kristal. Ihe ndị a na-ejikarị eme ihe gụnyere silicon carbide, silicon nitride, wdg, nke nwere ezigbo egwuregwu na otu kristal SiC na-eto eto.
3. kpo oku na sublimation: Debe isi iyi nke CVD-SiC na mkpụrụ n'ime ọkụ ọkụ dị elu ma nye ọnọdụ sublimation kwesịrị ekwesị. Sublimation pụtara na na okpomọkụ dị elu, isi ihe mgbochi na-agbanwe ozugbo site na ihe siri ike gaa na steeti vapor, wee maliteghachi condens n'elu mkpụrụ osisi iji mepụta otu kristal.
4. Njikwa okpomọkụ: N'oge usoro sublimation, okpomọkụ gradient na okpomọkụ nkesa kwesịrị ka a na-achịkwa kpọmkwem iji kwalite sublimation nke ngọngọ isi iyi na uto nke otu kristal. Njikwa okpomọkụ kwesịrị ekwesị nwere ike nweta ezigbo kristal na ọnụego uto.
5. Njikwa ikuku: N'oge usoro sublimation, ikuku mmeghachi omume kwesịkwara ịchịkwa. A na-ejikarị gas inert dị elu (dị ka argon) dị ka ikuku na-ebu ibu iji nọgide na-enwe nrụgide kwesịrị ekwesị na ịdị ọcha ma gbochie mmetọ site na adịghị ọcha.
6. Otu uto kristal: Isi mmalite nke CVD-SiC na-enweta mgbanwe mgbanwe vapor n'oge usoro sublimation ma na-atụgharị n'elu mkpụrụ osisi iji mepụta otu ihe owuwu kristal. Enwere ike nweta uto ngwa ngwa nke otu kristal SiC site na ọnọdụ sublimation kwesịrị ekwesị yana njikwa gradient okpomọkụ.