CVD siri ike SiC dị ọcha

Nkọwa dị mkpirikpi:

Ọganihu ngwa ngwa nke otu kristal SiC na-eji CVD-SiC nnukwu isi mmalite (Chemical Vapor Deposition - SiC) bụ usoro a na-ahụkarị maka ịkwadebe ihe kristal SiC dị elu. Enwere ike iji otu kristal ndị a na ngwa dị iche iche, gụnyere ngwa eletrọnịkị dị elu, ngwaọrụ optoelectronic, sensọ, na ngwaọrụ semiconductor.


Nkọwa ngwaahịa

Mkpado ngwaahịa

VET Energy na-eji ịdị ọcha dị oke elusilicon carbide (SiC)kpụrụ site kemịkalụ uzuoku ntinye(CVD)dị ka isi iyi ihe na-eto etoSiC kristalsite na njem ụgbọ elu anụ ahụ (PVT). Na PVT, a na-ebuba ihe isi mmalite n'ime acruciblema tinye ya na kristal mkpụrụ.

A chọrọ isi iyi dị ọcha dị elu iji mepụta mma dị eluSiC kristal.

VET Energy pụrụ iche n'inye nnukwu urughuru SiC maka PVT n'ihi na ọ nwere njupụta dị elu karịa obere urughuru ihe kpụrụ site na ọkụ ọkụ nke Si na C-nwere gas. N'adịghị ka singing siri ike ma ọ bụ mmeghachi omume nke Si na C, ọ dịghị achọ ọkụ ọkụ nke raara onwe ya nye ma ọ bụ nzọụkwụ na-ewe oge n'ime ọkụ ọkụ na-eto eto. Nke a nnukwu-urughi uru nwere ihe fọrọ nke nta ka ọ bụrụ mgbe nile ọnụ ọgụgụ evaporation, nke na-eme ka ọsọ-na-agba ọsọ uniformity.

Okwu mmalite:
1. Kwadebe CVD-SiC ngọngọ isi iyi: Nke mbụ, ịkwesịrị ịkwadebe ebe nchekwa CVD-SiC dị elu, nke na-abụkarị ịdị ọcha na njupụta dị elu. Enwere ike ịkwado nke a site na usoro ntinye mmiri mmiri (CVD) n'okpuru ọnọdụ mmeghachi omume kwesịrị ekwesị.

2. Nkwadebe mkpụrụ: Họrọ mkpụrụ kwesịrị ekwesị dị ka mkpụrụ maka SiC otu uto kristal. Ihe ndị a na-ejikarị eme ihe gụnyere silicon carbide, silicon nitride, wdg, nke nwere ezigbo egwuregwu na otu kristal SiC na-eto eto.

3. kpo oku na sublimation: Debe isi iyi nke CVD-SiC na mkpụrụ n'ime ọkụ ọkụ dị elu ma nye ọnọdụ sublimation kwesịrị ekwesị. Sublimation pụtara na na okpomọkụ dị elu, isi ihe mgbochi na-agbanwe ozugbo site na ihe siri ike gaa na steeti vapor, wee maliteghachi condens n'elu mkpụrụ osisi iji mepụta otu kristal.

4. Njikwa okpomọkụ: N'oge usoro sublimation, okpomọkụ gradient na okpomọkụ nkesa kwesịrị ka a na-achịkwa kpọmkwem iji kwalite sublimation nke ngọngọ isi iyi na uto nke otu kristal. Njikwa okpomọkụ kwesịrị ekwesị nwere ike nweta ezigbo kristal na ọnụego uto.

5. Njikwa ikuku: N'oge usoro sublimation, ikuku mmeghachi omume kwesịkwara ịchịkwa. A na-ejikarị gas inert dị elu (dị ka argon) dị ka ikuku na-ebu ibu iji nọgide na-enwe nrụgide kwesịrị ekwesị na ịdị ọcha ma gbochie mmetọ site na adịghị ọcha.

6. Otu uto kristal: Isi mmalite nke CVD-SiC na-enweta mgbanwe mgbanwe vapor n'oge usoro sublimation ma na-atụgharị n'elu mkpụrụ osisi iji mepụta otu ihe owuwu kristal. Enwere ike nweta uto ngwa ngwa nke otu kristal SiC site na ọnọdụ sublimation kwesịrị ekwesị yana njikwa gradient okpomọkụ.

Ihe mgbochi CVD SiC (2)

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