12 inch SOI wafer

Nkọwa dị mkpirikpi:

Nweta ihe ọhụrụ dị ka ọ dịtụbeghị mbụ site na 12 Inch SOI Wafer ọgbara ọhụrụ, ihe ịtụnanya teknụzụ nke VET Energy wetara gị. Emebere ya na nkenke na nka, Silicon-On-Insulator wafer na-akọwapụta ụkpụrụ ụlọ ọrụ, na-enye ogo na arụmọrụ enweghị atụ.


Nkọwa ngwaahịa

Mkpado ngwaahịa

VET Energy 12-inch SOI wafer bụ ihe nrụpụta semiconductor na-arụ ọrụ dị elu, nke a na-akwado nke ukwuu maka akụrụngwa eletriki ya kacha mma na nhazi pụrụ iche. VET Energy na-eji usoro nrụpụta SOI wafer dị elu iji hụ na wafer nwere obere ntapu dị ugbu a, ọsọ dị elu na nguzogide radieshon, na-enye ntọala siri ike maka sekit agbakwunyere arụmọrụ dị elu.

Ahịrị ngwaahịa VET Energy ejedebeghị na wafer SOI. Anyị na-enyekwa ihe dị iche iche nke semiconductor ihe, gụnyere Si Wafer, SiC Substrate, SiN Substrate, Epi Wafer, wdg, yana ihe ọhụrụ bandgap semiconductor ihe dị ka Gallium Oxide Ga2O3 na AlN Wafer. Ngwaahịa ndị a nwere ike gboo mkpa ngwa nke ndị ahịa dị iche iche na ngwa elektrọnik, RF, sensọ na mpaghara ndị ọzọ.

N'ilekwasị anya na ịdị mma, ndị na-emepụta SOI anyị na-ejikwa ihe dị elu dị ka gallium oxide Ga2O3, cassettes na AlN wafers iji hụ na a pụrụ ịdabere na ya na arụmọrụ na ọkwa ọ bụla. Tụkwasa obi VET Energy iji nye azịza dị oke ọnụ nke na-emeghe ụzọ maka ọganihu teknụzụ.

Wepụta ikike nke oru ngo gị site na ịrụ ọrụ dị elu nke VET Energy 12-inch SOI wafers. Jiri wafers kwalite ikike imepụta ihe ọhụrụ gị nke na-egosipụta ịdịmma, nkenke na ihe ọhụrụ, na-atọ ntọala maka ịga nke ọma na mpaghara teknụzụ siri ike nke semiconductor. Họrọ VET Energy maka ngwọta wafer SOI adịchaghị nke gafere atụmanya.

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Nkọwapụta WAFERING

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

TTV(GBIR)

≤6um

≤6um

Ụta(GF3YFCD)-Uru zuru oke

≤15μm

≤15μm

≤25μm

≤15μm

Warp(GF3YFER)

≤25μm

≤25μm

≤40μm

≤25μm

LTV (SBIR) -10mmx10mm

<2μm

Wafer Edge

Beveling

IMEcha elu ala

*n-Pm=n-ụdị Pm-Grade,n-Ps=n-ụdị Ps-Grade,Sl=Ọkara-lnsulating

Ihe

8-anụ ọhịa

6-anụ ọhịa

4-anụ ọhịa

nP

n-Pm

n-Ps

SI

SI

Emecha elu elu

Akụkụ abụọ Optical Polish, Si- Face CMP

Ọdịdị elu

(10um x 10um) Si-FaceRa≤0.2nm
C-Ihu Ra≤ 0.5nm

(5umx5um) Si-Face Ra≤0.2nm
C-Ihu Ra≤0.5nm

ibe ibe

Ọnweghị nke ekwenyere (ogologo na obosara≥0.5mm)

Indents

Ọnweghị nke ekwenyere

Scratches (Si-Ihu)

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Qty.≤5,Nchịkọta
Ogologo≤0.5 × dayameta wafer

Mgbawa

Ọnweghị nke ekwenyere

Mwepu ihu

3mm

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