PECVD Loading Tray Deposition Graphite Tray

Lus piav qhia luv luv:

VET Energy's PECVD Loading Tray yog tsim los muab kev ruaj ntseg thiab txawm tias kev txhawb nqa rau wafers thaum lub sij hawm tso nyiaj, txhim kho qhov sib xws thiab zoo ntawm cov txheej txheem deposition. Nrog nws cov cua sov ua haujlwm zoo heev, Graphite Tray pab tswj qhov chaw tswj hwm hauv PECVD chav, txo qhov kev pheej hmoo ntawm kev sib kis thiab ua kom cov txheej txheem ua haujlwm siab.

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Khoom cim npe

VET Energy PECVD loading tray yog cov neeg nqa khoom zoo tsim los rau PECVD (plasma enhanced chemical vapor deposition) txheej txheem. Qhov zoo tshaj plaws deposition graphite tais yog ua los ntawm high-purity, high-density graphite khoom. Nws muaj qhov zoo ntawm qhov kub thiab txias tsis kam, corrosion kuj, qhov ntev stability thiab lwm yam ntxwv. Nws tuaj yeem muab cov neeg nqa khoom ruaj khov rau cov txheej txheem PECVD thiab xyuas kom meej qhov sib xws thiab flatness ntawm zaj duab xis deposition.

VET Energy PECVD loading trays yog dav siv nyob rau hauv semiconductor, photovoltaic, LED thiab lwm yam teb. Piv txwv li:

▪ Semiconductor: PECVD txheej txheem rau cov khoom siv semiconductor xws li silicon wafers thiab epitaxial wafers.

▪ Photovoltaic: PECVD txheej txheem rau hnub ci cell nyias zaj duab xis.

▪ LED: PECVD txheej txheem rau LED chips.

Khoom zoo

▪Txhim kho zaj duab xis zoo:Ua kom cov yeeb yaj kiab tsis sib xws thiab txhim kho cov yeeb yaj kiab zoo.

▪Extend khoom lub neej:Zoo heev corrosion kuj, ncua lub neej kev pab cuam ntawm PECVD khoom.

▪Txo cov nqi tsim khoom:High-quality graphite tais tuaj yeem txo cov nqi seem thiab txo cov nqi tsim khoom.

Graphite khoom los ntawm SGL:

Tus Qauv Zauv: R6510
Index	Test txuj	Tus nqi	Chav tsev
Nruab nrab grain loj	ISO 13320 Kev Tswj Xyuas	10	ib m
Qhov ntom ntom	DIN IEC 60413 / 204 Kev Tswj Xyuas	1.83 ib	g/cm³
Qhib porosity	DIN66133	10	%
Nruab nrab pore loj	DIN66133	1.8	ib m
Permeability	TIAB SA 51935	0.06 ib	cm²/s
Rockwell hardness HR5/100	IEC 60413 / 303	90	HR
Tshwj xeeb hluav taws xob resistivity	DIN IEC 60413 / 402 Kev Tswj Xyuas	13	μΩm
Flexural zog	DIN IEC 60413 / 501 Kev Ua Haujlwm	60	MPa
Compressive zog	TIAB SA 51910	130	MPa
Young's modulus	TIAB SA 51915	11.5 × 10 hli	MPa
Thermal expansion (20-200 ℃)	TIAB SA 51909	4.2 X 10^-6	K^-1
Thermal conductivity (20 ℃)	TIAB SA 51908	105	Wm^-1K^-1

Nws yog tsim tshwj xeeb rau kev ua haujlwm siab hnub ci cell tsim, txhawb G12 loj-loj wafer ua. Optimized carrier tsim ho nce throughput, enabling ntau yield tus nqi thiab txo nqi ntau lawm.

Yam khoom	Hom	Number wafer cab kuj
PEVCD Grephite nkoj - Lub 156 series	156-13 grephite nkoj	144
	156-19 grephite nkoj	216
	156-21 grephite nkoj	240
	156-23 graphite nkoj	308
PEVCD Grephite nkoj - Lub 125 series	125-15 grephite nkoj	196
	125-19 grephite nkoj	252
	125-21 grphite nkoj	280