PECVD Graphite Wafer Support

Lus piav qhia luv luv:

Tsim los rau kev ua tau zoo thiab kev ua tau zoo, VET Energy's Graphite Wafer Support yog cov khoom siv zoo tshaj plaws rau kev siv cov khoom siv wafer siab heev, qhov chaw thermal stability thiab kev ua haujlwm zoo ib yam yog qhov tseem ceeb. Txawm hais tias koj tab tom ua haujlwm nrog semiconductor wafers lossis lwm cov khoom siv me me, qhov kev txhawb nqa graphite zoo no yuav txhim kho koj cov txheej txheem kev ntseeg tau thiab cov khoom zoo, ua rau nws yog ib qho tseem ceeb ntawm kev tsim khoom niaj hnub.

Xa email rau peb Download tau li PDF

Product Detail

Khoom cim npe

VET Energy PECVD txheej txheem graphite wafer txhawb nqa yog ib qho tseem ceeb consumable tsim rau PECVD (plasma enhanced tshuaj vapor deposition) txheej txheem. Cov khoom no yog ua los ntawm high-purity, high-density graphite khoom, nrog zoo heev kub tsis kam, corrosion kuj, seem stability thiab lwm yam ntxwv, muaj peev xwm muab ib tug ruaj khov platform rau PECVD txheej txheem, kom lub uniformity thiab flatness ntawm zaj duab xis deposition.

"Kev txhawb nqa graphite" tsim ntawm VET Zog graphite wafer kev txhawb nqa tuaj yeem tsis tsuas yog txhawb nqa lub wafer zoo xwb, tab sis kuj muab thermal stability nyob rau hauv qhov kub thiab txias siab PECVD ib puag ncig los xyuas kom meej stability ntawm cov txheej txheem.

VET Energy PECVD txheej txheem graphite wafer txhawb nqa muaj cov yam ntxwv hauv qab no:

▪High purity:tsis tshua muaj impurity cov ntsiab lus, zam kom tsis txhob muaj kab mob ntawm cov yeeb yaj kiab, kom ntseeg tau tias cov yeeb yaj kiab zoo.

▪High ceev:high density, siab mechanical zog, tuaj yeem tiv taus qhov kub thiab txias PECVD ib puag ncig.

▪Zoo dimensional stability:me me qhov hloov pauv ntawm qhov kub thiab txias kom ntseeg tau tias kev ruaj ntseg ntawm cov txheej txheem.

▪Zoo heev thermal conductivity:zoo hloov cua sov los tiv thaiv wafer overheating.

▪Muaj zog corrosion kuj:Muaj peev xwm tiv taus yaig los ntawm ntau yam corrosive gases thiab plasma.

▪Kev pabcuam customized:Graphite txhawb cov ntxhuav ntawm ntau qhov sib txawv thiab cov duab tuaj yeem kho raws li cov neeg siv khoom xav tau.

Graphite khoom los ntawm SGL:

Tus Qauv Zauv: R6510
Index	Test txuj	Tus nqi	Chav tsev
Nruab nrab grain loj	ISO 13320 Kev Tswj Xyuas	10	ib m
Qhov ntom ntom	DIN IEC 60413 / 204 Kev Tswj Xyuas	1.83 ib	g/cm³
Qhib porosity	DIN66133	10	%
Nruab nrab pore loj	DIN66133	1.8	ib m
Permeability	TIAB SA 51935	0.06 ib	cm²/s
Rockwell hardness HR5/100	IEC 60413 / 303	90	HR
Tshwj xeeb hluav taws xob resistivity	DIN IEC 60413 / 402 Kev Tswj Xyuas	13	μΩm
Flexural zog	DIN IEC 60413 / 501 Kev Ua Haujlwm	60	MPa
Compressive zog	TIAB SA 51910	130	MPa
Young's modulus	TIAB SA 51915	11.5 × 10 hli	MPa
Thermal expansion (20-200 ℃)	TIAB SA 51909	4.2 X 10^-6	K^-1
Thermal conductivity (20 ℃)	TIAB SA 51908	105	Wm^-1K^-1

Nws yog tsim tshwj xeeb rau kev ua haujlwm siab hnub ci cell tsim, txhawb G12 loj-loj wafer ua. Optimized carrier tsim ho nce throughput, enabling ntau yield tus nqi thiab txo nqi ntau lawm.

Yam khoom	Hom	Number wafer cab kuj
PEVCD Grephite nkoj - Lub 156 series	156-13 grephite nkoj	144
	156-19 grephite nkoj	216
	156-21 grephite nkoj	240
	156-23 graphite nkoj	308
PEVCD Grephite nkoj - Lub 125 series	125-15 grephite nkoj	196
	125-19 grephite nkoj	252
	125-21 grphite nkoj	280