Graphite Substrate Wafer Holder rau PECVD

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VET Energy's Graphite Substrate Holder yog tsim los tswj wafer kev sib raug zoo thiab kev ruaj ntseg thoob plaws hauv cov txheej txheem PECVD, tiv thaiv kev sib kis thiab txo qhov kev pheej hmoo ntawm kev puas tsuaj. Lub Graphite Wafer Holder muab kev ruaj ntseg, txawm tias lub platform, kom ntseeg tau tias cov wafers sib npaug rau cov ntshav kom zoo ib yam thiab muaj txiaj ntsig zoo. Nrog nws cov thermal conductivity thiab lub zog tshwj xeeb, tus tuav no pab txhim kho tag nrho cov txheej txheem kev ua tau zoo thiab kev ua haujlwm ntawm cov khoom.

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Khoom cim npe

VET Energy Graphite Substrate Wafer Holder yog cov neeg nqa khoom zoo tsim los rau PECVD (Plasma Enhanced Chemical Vapor Deposition) txheej txheem. Qhov zoo tshaj plaws Graphite Substrate Holder yog ua los ntawm high-purity, high-density graphite khoom, nrog zoo heev kub tsis kam, corrosion kuj, seem stability thiab lwm yam ntxwv. Nws tuaj yeem muab qhov kev txhawb nqa ruaj khov rau cov txheej txheem PECVD thiab xyuas kom muaj kev sib haum xeeb thiab flatness ntawm zaj duab xis deposition.

VET Energy PECVD txheej txheem graphite wafer txhawb lub rooj muaj cov yam ntxwv hauv qab no:

▪High purity:tsis tshua muaj impurity cov ntsiab lus, tsis txhob kis kab mob, xyuas kom meej zaj duab xis zoo.

▪High ceev:high density, siab mechanical zog, tuaj yeem tiv taus qhov kub thiab txias PECVD ib puag ncig.

▪Zoo dimensional stability:me me qhov hloov pauv ntawm qhov kub thiab txias, ua kom cov txheej txheem ruaj khov.

▪Zoo heev thermal conductivity:zoo hloov cua sov los tiv thaiv wafer overheating.

▪Muaj zog corrosion kuj:tuaj yeem tiv taus yaig los ntawm ntau yam corrosive gases thiab plasma.

▪Kev pabcuam customized:graphite txhawb cov ntxhuav ntawm ntau qhov sib txawv thiab cov duab tuaj yeem kho raws li cov neeg siv khoom xav tau.

Khoom zoo

▪Txhim kho zaj duab xis zoo:Ua kom cov yeeb yaj kiab tsis sib xws thiab txhim kho cov yeeb yaj kiab zoo.

▪Extend khoom lub neej:Zoo heev corrosion kuj, ncua lub neej kev pab cuam ntawm PECVD khoom.

▪Txo cov nqi tsim khoom:High-quality graphite tais tuaj yeem txo cov nqi seem thiab txo cov nqi tsim khoom.

Graphite khoom los ntawm SGL:

Tus Qauv Zauv: R6510
Index	Test txuj	Tus nqi	Chav tsev
Nruab nrab grain loj	ISO 13320 Kev Tswj Xyuas	10	ib m
Qhov ntom ntom	DIN IEC 60413 / 204 Kev Tswj Xyuas	1.83 ib	g/cm³
Qhib porosity	DIN66133	10	%
Nruab nrab pore loj	DIN66133	1.8	ib m
Permeability	TIAB SA 51935	0.06 ib	cm²/s
Rockwell hardness HR5/100	IEC 60413 / 303	90	HR
Tshwj xeeb hluav taws xob resistivity	DIN IEC 60413 / 402 Kev Tswj Xyuas	13	μΩm
Flexural zog	DIN IEC 60413 / 501 Kev Ua Haujlwm	60	MPa
Compressive zog	TIAB SA 51910	130	MPa
Young's modulus	TIAB SA 51915	11.5 × 10 hli	MPa
Thermal expansion (20-200 ℃)	TIAB SA 51909	4.2 X 10^-6	K^-1
Thermal conductivity (20 ℃)	TIAB SA 51908	105	Wm^-1K^-1

Nws yog tsim tshwj xeeb rau kev ua haujlwm siab hnub ci cell tsim, txhawb G12 loj-loj wafer ua. Optimized carrier tsim ho nce throughput, enabling ntau yield tus nqi thiab txo nqi ntau lawm.

Yam khoom	Hom	Number wafer cab kuj
PEVCD Grephite nkoj - Lub 156 series	156-13 grephite nkoj	144
	156-19 grephite nkoj	216
	156-21 grephite nkoj	240
	156-23 graphite nkoj	308
PEVCD Grephite nkoj - Lub 125 series	125-15 grephite nkoj	196
	125-19 grephite nkoj	252
	125-21 grphite nkoj	280