CVD (Chemical Vapor Deposition) yog ib txoj hauv kev siv los npaj cov txheej txheem silicon carbide.CVD silicon carbide txheejmuaj ntau yam tshwj xeeb kev ua tau zoo. Kab lus no yuav qhia txog kev npaj ntawm CVD silicon carbide txheej thiab nws cov yam ntxwv ua haujlwm.
1. Txoj kev npaj ntawmCVD silicon carbide txheej
CVD txoj kev hloov cov pa roj carbon monoxide rau hauv cov khoom siv silicon carbide coatings nyob rau hauv qhov kub thiab txias. Raws li qhov sib txawv gaseous precursors, nws tuaj yeem muab faib ua roj theem CVD thiab cov kua theem CVD.
1. Vapor theem CVD
Vapor theem CVD siv gaseous precursors, feem ntau organosilicon tebchaw, kom ua tiav kev loj hlob ntawm silicon carbide films. Feem ntau siv organosilicon tebchaw muaj xws li methylsilane, dimethylsilane, monosilane, thiab lwm yam, uas tsim silicon carbide films ntawm hlau substrates los ntawm thauj gaseous precursors mus rau hauv high-kub tshuaj tiv thaiv chambers. Cov cheeb tsam kub siab nyob rau hauv cov tshuaj tiv thaiv chamber feem ntau yog tsim los ntawm induction cua sov los yog resistive cua sov.
2. Ua kua theem CVD
Liquid-theem CVD siv cov kua ua ntej, feem ntau yog cov kuab tshuaj organic uas muaj silicon thiab silanol compound, uas yog rhuab thiab vaporized nyob rau hauv cov tshuaj tiv thaiv chamber, thiab tom qab ntawd cov silicon carbide zaj duab xis yog tsim rau ntawm substrate los ntawm cov tshuaj tiv thaiv.
2. Kev ua tau zoo ntawmCVD silicon carbide txheej
1.Kev ua haujlwm kub zoo heev
CVD silicon carbide txheejmuab zoo heev kub stability thiab oxidation kuj. Nws muaj peev xwm ua haujlwm nyob rau hauv qhov kub thiab txias thiab tuaj yeem tiv taus huab cua kub.
2.Zoo mechanical zog
CVD silicon carbide txheejmuaj siab hardness thiab zoo hnav tsis kam. Nws tiv thaiv hlau substrates los ntawm hnav thiab corrosion, ncua cov khoom siv lub neej.
3. Zoo heev tshuaj stability
CVD silicon carbide txheejyog cov resistant rau tej tshuaj xws li acids, alkalis thiab ntsev. Nws resists tshuaj tua kab mob thiab corrosion ntawm lub substrate.
4. Tsawg kev sib txhuam coefficient
CVD silicon carbide txheejNws muaj qhov sib txhuam coefficient tsawg thiab zoo nws tus kheej lubricating zog. Nws txo kev sib txhuam thiab hnav thiab txhim kho kev siv cov khoom siv.
5.Cov thermal conductivity zoo
CVD silicon carbide txheej muaj cov thermal conductivity zoo. Nws tuaj yeem ua cov cua sov sai thiab txhim kho cov cua sov kom zoo ntawm cov hlau puag.
6.Excellent hluav taws xob rwb thaiv tsev zog
CVD silicon carbide txheej muaj cov khoom siv hluav taws xob zoo thiab tuaj yeem tiv thaiv cov dej ntws tam sim no. Nws yog dav siv hauv kev tiv thaiv kev tiv thaiv hluav taws xob.
7. Adjustable thickness thiab muaj pes tsawg leeg
Los ntawm kev tswj cov xwm txheej thaum lub sij hawm CVD txheej txheem thiab cov concentration ntawm cov precursor, lub thickness thiab muaj pes tsawg leeg ntawm silicon carbide zaj duab xis tuaj yeem hloov kho. Qhov no muab ntau txoj kev xaiv thiab yooj yim rau ntau yam kev siv.
Nyob rau hauv luv luv, CVD silicon carbide txheej muaj qhov kub thiab txias kev ua tau zoo, zoo heev mechanical zog, zoo tshuaj stability, tsis tshua muaj kev sib txhuam coefficient, zoo thermal conductivity thiab hluav taws xob rwb thaiv tsev zog. Cov khoom no ua rau CVD silicon carbide coatings dav siv nyob rau hauv ntau lub teb, xws li electronics, optics, aerospace, tshuaj lom neeg kev lag luam, thiab lwm yam.
Post lub sij hawm: Mar-20-2024