Kev tsim khoom ntawm txhua yam khoom semiconductor xav tau ntau pua txheej txheem. Peb faib tag nrho cov txheej txheem tsim khoom ua yim kauj ruam:waferua-oxidation-photolithography-etching-nyias zaj duab xis deposition-epitaxial loj hlob-diffusion-ion implantation.
Txhawm rau pab koj nkag siab thiab paub txog cov khoom siv hluav taws xob thiab cov txheej txheem cuam tshuam, peb yuav thawb WeChat cov ntawv hauv txhua qhov teeb meem los qhia txhua cov kauj ruam saum toj no ib los ntawm ib qho.
Nyob rau hauv tsab xov xwm dhau los, nws tau hais tias txhawm rau tiv thaiv tuswaferlos ntawm ntau yam impurities, oxide zaj duab xis tau ua - txheej txheem oxidation. Niaj hnub no peb yuav tham txog " txheej txheem kev yees duab" ntawm kev yees duab semiconductor tsim Circuit Court ntawm wafer nrog oxide zaj duab xis tsim.
Photolithography txheej txheem
1. Cov txheej txheem photolithography yog dab tsi
Photolithography yog ua kom cov circuits thiab cov chaw ua haujlwm uas yuav tsum tau ua rau kev tsim cov nti.
Lub teeb tawm los ntawm lub tshuab photolithography yog siv los nthuav tawm cov zaj duab xis nyias coated nrog photoresist los ntawm lub npog ntsej muag nrog cov qauv. Lub photoresist yuav hloov nws cov khoom tom qab pom lub teeb, kom cov qauv ntawm lub npog ntsej muag tau theej rau hauv cov yeeb yaj kiab nyias, kom cov yeeb yaj kiab nyias nyias muaj lub luag haujlwm ntawm daim duab hluav taws xob hluav taws xob. Qhov no yog lub luag haujlwm ntawm photolithography, zoo ib yam li kev thaij duab nrog lub koob yees duab. Cov duab thaij los ntawm lub koob yees duab tau luam tawm ntawm cov yeeb yaj kiab, thaum lub photolithography tsis kos duab, tab sis cov duab kos duab thiab lwm yam khoom siv hluav taws xob.
Photolithography yog qhov tseeb micro-machining thev naus laus zis
Pa photolithography yog cov txheej txheem uas siv lub teeb ultraviolet nrog lub wavelength ntawm 2000 txog 4500 angstroms raws li cov ntaub ntawv xov xwm, thiab siv photoresist ua qhov nruab nrab (duab kaw) nruab nrab kom ua tiav qhov kev hloov pauv, hloov pauv thiab ua cov duab, thiab thaum kawg xa cov duab. cov ntaub ntawv mus rau nti (tsuas yog silicon nti) los yog dielectric txheej.
Nws tuaj yeem hais tias photolithography yog lub hauv paus ntawm niaj hnub semiconductor, microelectronics, thiab cov ntaub ntawv kev lag luam, thiab photolithography ncaj qha txiav txim siab txog qib kev loj hlob ntawm cov thev naus laus zis no.
Nyob rau hauv ntau tshaj 60 xyoo txij li qhov kev tsim ua tiav ntawm kev sib xyaw ua ke hauv xyoo 1959, cov kab dav ntawm nws cov duab tau raug txo los ntawm plaub qhov kev txiav txim ntawm qhov loj, thiab kev sib koom ua ke hauv Circuit Court tau txhim kho los ntawm ntau tshaj rau qhov kev txiav txim ntawm qhov loj. Qhov kev vam meej sai ntawm cov thev naus laus zis no feem ntau yog los ntawm kev txhim kho photolithography.
(Qhov yuav tsum tau muaj rau photolithography thev naus laus zis ntawm ntau theem ntawm kev txhim kho kev tsim hluav taws xob sib xyaw ua ke)
2. Cov hauv paus ntsiab lus ntawm photolithography
Cov ntaub ntawv Photolithography feem ntau xa mus rau photoresists, tseem hu ua photoresists, uas yog cov khoom siv tseem ceeb tshaj plaws hauv photolithography. Cov khoom siv no muaj cov yam ntxwv ntawm lub teeb (xws li pom lub teeb, ultraviolet lub teeb, hluav taws xob nqaj, thiab lwm yam) cov tshuaj tiv thaiv. Tom qab photochemical cov tshuaj tiv thaiv, nws solubility hloov pauv loj.
Ntawm lawv, cov solubility ntawm zoo photoresist nyob rau hauv tus tsim tawm nce, thiab cov qauv tau txais yog tib yam li daim npog qhov ncauj; tsis zoo photoresist yog qhov opposite, uas yog, lub solubility txo los yog txawm yuav insoluble tom qab raug rau tus tsim tawm, thiab cov qauv tau yog opposite rau lub npog ncauj. Daim ntawv thov teb ntawm ob hom photoresists txawv. Qhov zoo photoresists feem ntau siv, suav txog ntau dua 80% ntawm tag nrho.
Cov saum toj no yog daim duab schematic ntawm cov txheej txheem photolithography
(1) Gluing: uas yog, tsim cov yeeb yaj kiab photoresist nrog cov tuab tuab, muaj zog adhesion thiab tsis muaj qhov tsis xws luag ntawm silicon wafer. Txhawm rau txhim kho qhov adhesion ntawm cov yeeb yaj kiab photoresist thiab silicon wafer, nws yog ib qho tsim nyog yuav tsum xub hloov qhov saum npoo ntawm silicon wafer nrog cov khoom xws li hexamethyldisilazane (HMDS) thiab trimethylsilyldiethylamine (TMSDEA). Tom qab ntawd, cov yeeb yaj kiab photoresist yog npaj los ntawm cov txheej txheej.
(2) Pre-baking: Tom qab txheej txheej, cov yeeb yaj kiab photoresist tseem muaj qee cov kuab tshuaj. Tom qab ci ntawm qhov kub siab dua, qhov hnyav tuaj yeem raug tshem tawm tsawg li sai tau. Tom qab ua ntej ci, cov ntsiab lus ntawm photoresist yog txo kom txog li 5%.
(3) Raug: Qhov ntawd yog, lub photoresist raug rau lub teeb. Lub sijhawm no, photoreaction tshwm sim, thiab qhov sib txawv ntawm qhov sib txawv ntawm qhov illuminated thiab qhov tsis pom kev tshwm sim.
(4) Kev txhim kho & hardening: Cov khoom yog immersed nyob rau hauv tus tsim tawm. Nyob rau lub sijhawm no, thaj chaw nthuav tawm ntawm qhov zoo photoresist thiab thaj chaw tsis pom ntawm qhov tsis zoo photoresist yuav yaj hauv txoj kev loj hlob. Qhov no nthuav tawm cov qauv peb-dimensional. Tom qab kev txhim kho, cov nti xav tau cov txheej txheem kev kho cua kub kom dhau los ua cov yeeb yaj kiab nyuaj, uas feem ntau ua haujlwm los txhim kho cov adhesion ntawm photoresist rau substrate.
(5) Etching: Cov khoom hauv qab photoresist yog etched. Nws suav nrog kua ntub dej etching thiab gaseous qhuav etching. Piv txwv li, rau ntub etching ntawm silicon, ib tug acidic aqueous tov ntawm hydrofluoric acid yog siv; Rau ntub etching ntawm tooj liab, ib tug muaj zog acid tov xws li nitric acid thiab sulfuric acid yog siv, thaum qhuav etching feem ntau siv plasma los yog high-zog ion beams ua puas lub nto ntawm cov khoom thiab etch nws.
(6) Degumming: Thaum kawg, lub photoresist yuav tsum tau muab tshem tawm ntawm qhov chaw ntawm lub lens. Cov kauj ruam no yog hu ua degumming.
Kev nyab xeeb yog qhov teeb meem tseem ceeb tshaj plaws hauv txhua qhov kev tsim khoom semiconductor. Lub ntsiab txaus ntshai thiab teeb meem photolithography gases nyob rau hauv lub nti lithography txheej txheem yog raws li nram no:
1. Hydrogen peroxide
Hydrogen peroxide (H2O2) yog ib qho muaj zog oxidant. Kev sib cuag ncaj qha tuaj yeem ua rau tawv nqaij thiab qhov muag o thiab kub hnyiab.
2. Xylene
Xylene yog cov kuab tshuaj thiab tsim tawm siv hauv kev tsis zoo lithography. Nws yog nplaim taws thiab muaj qhov kub thiab txias tsuas yog 27.3 ℃ (kwv yees li chav tsev kub). Nws yog tawg thaum lub concentration nyob rau hauv cov huab cua yog 1% -7%. Kev sib cuag nrog xylene tuaj yeem ua rau tawv nqaij mob. Xylene vapor yog qab zib, zoo ib yam li qhov tsw ntawm lub dav hlau tack; Kev raug xylene tuaj yeem ua rau mob ntawm qhov muag, qhov ntswg thiab caj pas. Kev nqus pa ntawm cov pa tuaj yeem ua rau mob taub hau, kiv taub hau, tsis qab los noj mov thiab qaug zog.
3. Hexamethyldisilazane (HMDS)
Hexamethyldisilazane (HMDS) feem ntau yog siv los ua cov txheej txheej primer los ua kom cov adhesion ntawm photoresist ntawm cov khoom. Nws yog flammable thiab muaj qhov taw tes ntawm 6.7 ° C. Nws yog tawg thaum lub concentration nyob rau hauv cov huab cua yog 0.8% -16%. HMDS reacts nrog dej, cawv thiab ntxhia acids kom tso tawm ammonia.
4. Tetramethylammonium hydroxide
Tetramethylammonium hydroxide (TMAH) yog dav siv los ua tus tsim tawm rau lithography zoo. Nws yog tshuaj lom thiab corrosive. Nws tuaj yeem ua rau tuag taus yog tias nqos los yog kov ncaj qha rau ntawm daim tawv nqaij. Kev sib cuag nrog TMAH hmoov av los yog huab cua tuaj yeem ua rau qhov muag, tawv nqaij, qhov ntswg thiab caj pas. Kev nqus pa ntawm TMAH siab yuav ua rau tuag taus.
5. Cov tshuaj chlorine thiab fluorine
Chlorine (Cl2) thiab fluorine (F2) yog ob qho tib si siv nyob rau hauv excimer lasers li tob ultraviolet thiab huab ultraviolet (EUV) qhov chaw. Cov pa roj carbon monoxide ob leeg muaj tshuaj lom, tshwm sim ntsuab, thiab muaj ntxhiab tsw ntxhiab tsw. Inhalation ntawm high concentrations ntawm no gas yuav ua rau tuag. Cov roj fluorine tuaj yeem hnov mob nrog dej los tsim cov roj hydrogen fluoride. Hydrogen fluoride roj yog cov kua qaub uas ua rau tawv nqaij, qhov muag thiab ua pa thiab ua rau muaj cov tsos mob xws li kub hnyiab thiab ua pa nyuaj. Cov ntsiab lus siab ntawm fluoride tuaj yeem ua rau muaj kuab lom rau tib neeg lub cev, ua rau cov tsos mob xws li mob taub hau, ntuav, raws plab, thiab coma.
6. Argon
Argon (Ar) yog ib qho roj inert uas feem ntau tsis ua rau tib neeg lub cev raug mob. Raws li ib txwm muaj, cov neeg ua pa ntawm huab cua muaj txog 0.93% argon, thiab qhov concentration no tsis muaj txiaj ntsig zoo rau tib neeg lub cev. Txawm li cas los xij, qee zaum, argon yuav ua rau muaj kev phom sij rau tib neeg lub cev.
Nov yog qee qhov ua tau: Hauv qhov chaw kaw, qhov concentration ntawm argon tuaj yeem nce ntxiv, yog li txo cov pa oxygen hauv huab cua thiab ua rau hypoxia. Qhov no yuav ua rau cov tsos mob xws li kiv taub hau, qaug zog, thiab ua tsis taus pa. Tsis tas li ntawd, argon yog ib qho roj inert, tab sis nws yuav tawg nyob rau hauv qhov kub thiab txias.
7. Neon
Neon (Ne) yog cov roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab tsw uas tsis koom nrog Cov roj neon tsis koom nrog cov txheej txheem ua pa ntawm tib neeg, yog li ua pa hauv qhov siab ntawm neon roj yuav ua rau hypoxia. Yog tias koj nyob hauv lub xeev ntawm hypoxia ntev, koj tuaj yeem ntsib cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj neon tuaj yeem ua rau muaj kev cuam tshuam nrog lwm yam khoom nyob rau hauv qhov kub thiab txias los yog kub siab ua rau hluav taws kub los yog tawg.
8. xenon gas
xenon roj (Xe) yog cov roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab tsw uas tsis koom nrog tib neeg cov txheej txheem ua pa, yog li ua pa hauv qhov siab ntawm xenon roj yuav ua rau hypoxia. Yog tias koj nyob hauv lub xeev ntawm hypoxia ntev, koj tuaj yeem ntsib cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj neon tuaj yeem ua rau muaj kev cuam tshuam nrog lwm yam khoom nyob rau hauv qhov kub thiab txias los yog kub siab ua rau hluav taws kub los yog tawg.
9. Krypton roj
Krypton gas (Kr) yog cov roj ruaj khov, tsis muaj xim thiab tsis muaj ntxhiab tsw uas tsis koom nrog tib neeg cov txheej txheem ua pa, yog li ua pa hauv qhov siab ntawm krypton roj yuav ua rau hypoxia. Yog tias koj nyob hauv lub xeev ntawm hypoxia ntev, koj tuaj yeem ntsib cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj xenon tuaj yeem hnov mob nrog lwm yam khoom nyob rau hauv qhov kub thiab txias los yog kub siab ua rau hluav taws kub los yog tawg. Ua pa hauv ib puag ncig nrog oxygen deprivation tuaj yeem ua rau hypoxia. Yog tias koj nyob hauv lub xeev ntawm hypoxia ntev, koj tuaj yeem ntsib cov tsos mob xws li mob taub hau, xeev siab, thiab ntuav. Tsis tas li ntawd, cov roj krypton tuaj yeem ua rau muaj kev cuam tshuam nrog lwm yam khoom nyob rau hauv qhov kub thiab txias los yog kub siab ua rau hluav taws kub los yog tawg.
Cov kev daws teeb meem rau cov khoom siv hluav taws xob tsis zoo rau kev lag luam semiconductor
Kev lag luam semiconductor suav nrog kev tsim khoom, kev tsim khoom, thiab cov txheej txheem ntawm cov nplaim taws, tawg, muaj kuab lom, thiab cov pa phem. Raws li ib tug neeg siv cov pa roj hauv cov chaw tsim khoom semiconductor, txhua tus neeg ua haujlwm yuav tsum nkag siab txog cov ntaub ntawv kev nyab xeeb ntawm ntau yam khoom siv phom sij ua ntej siv, thiab yuav tsum paub yuav ua li cas los daws cov txheej txheem xwm txheej ceev thaum cov pa roj no tawm.
Hauv kev tsim khoom, kev tsim khoom, thiab kev cia khoom ntawm kev lag luam semiconductor, txhawm rau kom tsis txhob poob ntawm lub neej thiab cov khoom siv los ntawm kev xau ntawm cov pa phem no, nws yog ib qho tsim nyog yuav tsum tau nruab cov cuab yeej ntsuas roj kom pom cov pa roj.
Gas detectors tau dhau los ua cov cuab yeej saib xyuas ib puag ncig tseem ceeb hauv kev lag luam semiconductor niaj hnub no, thiab tseem yog cov cuab yeej saib xyuas ncaj qha tshaj plaws.
Riken Keiki ib txwm tau them nyiaj rau kev nyab xeeb ntawm kev tsim khoom lag luam semiconductor, nrog rau lub hom phiaj ntawm kev tsim kom muaj kev nyab xeeb ua haujlwm rau tib neeg, thiab tau mob siab rau nws tus kheej los tsim cov roj sensors tsim nyog rau kev lag luam semiconductor, muab cov kev daws teeb meem tsim nyog rau ntau yam teeb meem ntsib. cov neeg siv, thiab txuas ntxiv txhim kho cov khoom lag luam thiab kev ua kom zoo dua qub.
Post lub sij hawm: Lub Xya hli ntuj-16-2024