Silicon carbide (SiC) yog cov khoom siv semiconductor tshiab. Silicon carbide muaj qhov sib txawv loj (kwv yees li 3 zaug silicon), lub zog tseem ceeb heev (li 10 npaug silicon), siab thermal conductivity (kwv yees li 3 zaug silicon). Nws yog ib qho tseem ceeb ntawm cov khoom siv semiconductor tom ntej. SiC coatings yog siv dav hauv kev lag luam semiconductor thiab hnub ci photovoltaics. Hauv particular, cov susceptors siv nyob rau hauv epitaxial kev loj hlob ntawm LEDs thiab Si ib leeg siv lead ua epitaxy yuav tsum tau siv SiC txheej. Vim muaj zog nce siab ntawm LEDs hauv kev lag luam teeb pom kev zoo thiab kev lag luam, thiab kev loj hlob ntawm kev lag luam semiconductor,SiC txheej khoomkev cia siab yog zoo heev.
APPLICATION FIELD
Purity, SEM Structure, thickness tsom xam ntawmSiC txheej
Lub purity ntawm SiC txheej ntawm graphite los ntawm kev siv CVD yog siab li 99.9995%. Nws cov qauv yog fcc. SiC films coated on graphite yog (111) taw qhia raws li qhia nyob rau hauv cov ntaub ntawv XRD (Fig.1) qhia nws siab crystalline zoo. Lub thickness ntawm SiC zaj duab xis yog heev uniform raws li qhia nyob rau hauv daim duab 2.
Daim duab 2: thickness uniform ntawm SiC films SEM thiab XRD ntawm beta-SiC zaj duab xis ntawm graphite
SEM cov ntaub ntawv ntawm CVD SiC nyias zaj duab xis, siv lead ua loj yog 2 ~ 1 Opm
Cov qauv siv lead ua ntawm CVD SiC zaj duab xis yog lub ntsej muag-centered cubic qauv, thiab cov yeeb yaj kiab kev loj hlob yog ze rau 100%
Silicon carbide (SiC) coatedpuag yog lub hauv paus zoo tshaj plaws rau ib leeg siv lead ua silicon thiab GaN epitaxy, uas yog lub hauv paus tseem ceeb ntawm lub tshuab hluav taws xob epitaxy. Lub hauv paus yog ib qho tseem ceeb tsim khoom siv rau monocrystalline silicon rau kev sib xyaw ua ke loj. Nws muaj purity siab, kub tsis kam, corrosion kuj, zoo huab cua nruj thiab lwm yam khoom zoo heev.
Cov khoom siv thiab kev siv
Graphite puag txheej rau ib leeg siv lead ua silicon epitaxial kev loj hlobSuitable rau Aixtron cov cav tov, thiab lwm yam txheej thickness: 90 ~ 150um Lub cheeb ntawm lub wafer crater yog 55 hli.
Post lub sij hawm: Mar-14-2022