VET ZogPECVD txheej txheem graphite cab kuj yog cov khoom siv tau zoo rau PECVD (plasma enhanced chemical vapor deposition) txheej txheem. Lub graphite cab kuj yog ua los ntawm high-purity, high-density graphite khoom, nrog zoo heev kub tsis kam, corrosion kuj, seem stability thiab lwm yam ntxwv, muaj peev xwm muab ib tug ruaj khov carrier platform rau PECVD txheej txheem, kom lub uniformity thiab flatness ntawm nyias zaj duab xis. tso nyiaj.
Graphite carriers rau PECVD txheej txheem muaj cov yam ntxwv hauv qab no:
▪ High purity: tsis tshua muaj impurity cov ntsiab lus, tsis txhob kis cov yeeb yaj kiab thiab ua kom cov yeeb yaj kiab zoo.
▪ High density: high density, high mechanical zog, muaj peev xwm tiv taus kub thiab kub siab PECVD ib puag ncig.
▪ Kev ruaj ntseg zoo: me me hloov pauv ntawm qhov kub thiab txias, ua kom cov txheej txheem ruaj khov.
▪ Cov thermal conductivity zoo heev: hloov cov cua sov kom tiv thaiv wafer overheating.
▪ Muaj zog corrosion kuj: muaj peev xwm tiv taus yaig los ntawm ntau yam corrosive gases thiab plasma.
▪ Customized service: graphite carriers ntawm ntau qhov sib txawv thiab cov duab tuaj yeem hloov kho raws li cov neeg siv khoom xav tau.
Graphite khoom los ntawm SGL:
Tus Qauv Zauv: R6510 | |||
Index | Test txuj | Tus nqi | Chav tsev |
Nruab nrab grain loj | ISO 13320 Kev Tswj Xyuas | 10 | ib m |
Qhov ntom ntom | DIN IEC 60413 / 204 Kev Tswj Xyuas | 1.83 ib | g/cm3 |
Qhib porosity | DIN66133 | 10 | % |
Nruab nrab pore loj | DIN66133 | 1.8 | ib m |
Permeability | TIAB SA 51935 | 0.06 ib | cm²/s |
Rockwell hardness HR5/100 | IEC 60413 / 303 | 90 | HR |
Tshwj xeeb hluav taws xob resistivity | DIN IEC 60413 / 402 Kev Tswj Xyuas | 13 | μΩm |
Flexural zog | DIN IEC 60413 / 501 Kev Ua Haujlwm | 60 | MPa |
Compressive zog | TIAB SA 51910 | 130 | MPa |
Young's modulus | TIAB SA 51915 | 11.5 × 10 hli | MPa |
Thermal expansion (20-200 ℃) | TIAB SA 51909 | 4.2 X 10-6 | K-1 |
Thermal conductivity (20 ℃) | TIAB SA 51908 | 105 | Wm-1K-1 |
Nws yog tsim tshwj xeeb rau kev ua haujlwm siab hnub ci cell tsim, txhawb G12 loj-loj wafer ua. Optimized carrier tsim ho nce throughput, enabling ntau yield tus nqi thiab txo nqi ntau lawm.
Yam khoom | Hom | Number wafer cab kuj |
PEVCD Grephite nkoj - Lub 156 series | 156-13 grephite nkoj | 144 |
156-19 grephite nkoj | 216 | |
156-21 grephite nkoj | 240 | |
156-23 graphite nkoj | 308 | |
PEVCD Grephite nkoj - Lub 125 series | 125-15 grephite nkoj | 196 |
125-19 grephite nkoj | 252 | |
125-21 grphite nkoj | 280 |