VET ZogPECVD graphite nkoj rau hnub ci hlwb yog cov khoom siv tseem ceeb tsim los rau PECVD (plasma enhanced chemical vapor deposition) txheej txheem ntawm lub hnub ci. Lub nkoj graphite yog ua los ntawm high-purity isostatic graphite nrog ib tug porosity ntawm tsawg tshaj li 15% thiab ib tug nto roughness ntawm Ra≤1.6μm. Nws muaj cov khoom zoo xws li kub tsis kam, corrosion kuj, thiab seem stability. Kev ruaj ntseg zoo heev thiab thermal conductivity ua kom cov yeeb yaj kiab zoo ib yam thiab txhim kho roj teeb ua haujlwm. Nws tuaj yeem muab cov neeg nqa khoom ruaj khov nyob rau hauv qhov kub thiab txias siab PECVD ib puag ncig kom ntseeg tau tias cov khoom tso tawm tsis zoo thiab ua haujlwm zoo ntawm lub hnub ci ntawm cov yeeb yaj kiab.
Graphite khoom los ntawm SGL:
Tus Qauv Zauv: R6510 | |||
Index | Test txuj | Tus nqi | Chav tsev |
Nruab nrab grain loj | ISO 13320 Kev Tswj Xyuas | 10 | ib m |
Qhov ntom ntom | DIN IEC 60413 / 204 Kev Tswj Xyuas | 1.83 ib | g/cm3 |
Qhib porosity | DIN66133 | 10 | % |
Nruab nrab pore loj | DIN66133 | 1.8 | ib m |
Permeability | TIAB SA 51935 | 0.06 ib | cm²/s |
Rockwell hardness HR5/100 | IEC 60413 / 303 | 90 | HR |
Tshwj xeeb hluav taws xob resistivity | DIN IEC 60413 / 402 Kev Tswj Xyuas | 13 | μΩm |
Flexural zog | DIN IEC 60413 / 501 Kev Ua Haujlwm | 60 | MPa |
Compressive zog | TIAB SA 51910 | 130 | MPa |
Young's modulus | TIAB SA 51915 | 11.5 × 10 hli | MPa |
Thermal expansion (20-200 ℃) | TIAB SA 51909 | 4.2 X 10-6 | K-1 |
Thermal conductivity (20 ℃) | TIAB SA 51908 | 105 | Wm-1K-1 |
Nws yog tsim tshwj xeeb rau kev ua haujlwm siab hnub ci cell tsim, txhawb G12 loj-loj wafer ua. Optimized carrier tsim ho nce throughput, enabling ntau yield tus nqi thiab txo nqi ntau lawm.
Yam khoom | Hom | Number wafer cab kuj |
PEVCD Grephite nkoj - Lub 156 series | 156-13 grephite nkoj | 144 |
156-19 grephite nkoj | 216 | |
156-21 grephite nkoj | 240 | |
156-23 graphite nkoj | 308 | |
PEVCD Grephite nkoj - Lub 125 series | 125-15 grephite nkoj | 196 |
125-19 grephite nkoj | 252 | |
125-21 grphite nkoj | 280 |