AdvancedSiC Cantilever Paddlerau Wafer Processing tsim los ntawm vet-china muab kev daws teeb meem zoo rau kev tsim khoom semiconductor. Lub cantilever paddle no yog ua los ntawm SiC (silicon carbide) cov khoom, thiab nws cov hardness siab thiab kub tsis kam ua kom nws muaj kev ua tau zoo nyob rau hauv qhov kub thiab txias thiab corrosive ib puag ncig. Tus tsim ntawm Cantilever Paddle tso cai rau lub wafer kom ntseeg tau tias kev txhawb nqa thaum ua, txo qhov kev pheej hmoo ntawm kev tawg thiab kev puas tsuaj.
SiC Cantilever Paddleyog cov khoom siv tshwj xeeb siv hauv cov khoom siv hluav taws xob semiconductor xws li oxidation rauv, diffusion furnace, thiab annealing rauv, qhov tseem ceeb yog siv rau wafer loading thiab unloading, txhawb nqa thiab thauj wafers thaum lub sij hawm kub txheej txheem.
Cov qauv tsimntawmSiCcantileverpaddle: ib lub cantilever qauv, tsau ntawm ib kawg thiab dawb ntawm lwm yam, feem ntau muaj lub tiaj tus thiab paddle-zoo li tsim.
VET Zog siv cov purity siab recrystallized silicon carbide cov ntaub ntawv los lav qhov zoo.
| Lub cev muaj zog ntawm Recrystalized Silicon Carbide | |
| Khoom | Tus nqi |
| Ua haujlwm kub (°C) | 1600 ° C (nrog oxygen), 1700 ° C (txo ib puag ncig) |
| SiC cov ntsiab lus | > 99.96% |
| Dawb Si cov ntsiab lus | <0.1% |
| Qhov ntom ntom | 2.60-2.70 g / cm33 |
| Pom tseeb porosity | <16% |
| Compression zog | > 600MPa |
| Txias dabtsi yog khoov zog | 80-90 MPa (20 ° C) |
| Kub dabtsi yog khoov zog | 90-100 MPa (1400 ° C) |
| Thermal expansion @ 1500 ° C | 4.70 10-6/°C |
| Thermal conductivity @ 1200 ° C | 23W/m•K |
| Elastic modulus | 240 GPa |
| Thermal shock tsis kam | Zoo heev |
Qhov zoo ntawm VET Energy's Advanced SiC Cantilever Paddle rau Wafer Processing yog:
-High kub stability: siv tau nyob rau hauv ib puag ncig saum 1600 ° C;
- Tsawg thermal expansion coefficient: tswj qhov seem stability, txo wafer warpage txaus ntshai;
-High purity: txo qis kev pheej hmoo ntawm cov hlau paug;
-Chemical inertness: corrosion-resistant, haum rau ntau yam roj av ib puag ncig;
-High lub zog thiab hardness: Hnav-resistant, ntev kev pab cuam lub neej;
-Cov thermal conductivity zoo: pab hauv cov cua sov sib xws.
