ʻO Tantalum carbide i uhi ʻia i ka susceptor no ka wafer

ʻO Tantalum carbide i uhi ʻia ka susceptor no ka wafer Kiʻi Hōʻikeʻike

ʻO ka wehewehe pōkole:

He alakaʻi ʻo Semicera i ka ʻenehana pale wela wela a haʻaheo mākou e hoʻolauna i nā huahana uhi uhi CVD Tantalum Carbide (TaC) e hāʻawi i ka pale wela kiʻekiʻe hilinaʻi no kāu substrates graphite.ʻO ka Graphite kahi mea pale wela kiʻekiʻe maikaʻi loa, akā maʻalahi ia i ka oxidation i nā wela kiʻekiʻe, ʻaʻole hiki ke pale ʻia i loko o ka umu ahi.Hiki i kā mākou uhi CVD Tantalum Carbide (TaC) ke pale pono i ka oxidation o ka substrate graphite me ka mālama ʻana i kāna hana wela kiʻekiʻe.ʻO TaC kekahi mea inert hiki ke pale aku i nā hopena me nā kinoea e like me argon a me ka hydrogen.E kūkākūkā iā Semicera i kēia lā e aʻo hou aʻe e pili ana i kā mākou Tantalum Carbide CVD coated EPI susceptors e hōʻoia i ka paʻa a me ka hilinaʻi o kāu mau noi wela kiʻekiʻe.

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

ʻO ka uhi ʻana o TaC kahi ʻano o ka tantalum carbide (TaC) uhi i hoʻomākaukau ʻia e ka ʻenehana hoʻoheheʻe kino kino, aia nā ʻano aʻe:

1. ʻO ka paʻakikī kiʻekiʻe: He kiʻekiʻe ka paʻakikī o ka uhi ʻana o TaC, maʻamau hiki ke hōʻea i 2500-3000HV, he mea paʻakikī maikaʻi loa.

2. Wear resistance: ʻO ka uhiʻana o TaC he mea hiki ke hoʻemi maikaʻi i kaʻaʻahu a me ka pōʻino o nā'āpana mechanical i ka wā e hoʻohana ai.

3. ʻO ke kūpaʻa wela kiʻekiʻe maikaʻi: hiki i ka uhi ʻana o TaC ke mālama i kāna hana maikaʻi ma lalo o ke kaiapuni wela.

4. Paʻa kemika maikaʻi: He kūpaʻa kemika maikaʻi ka uhi ʻana o TaC a hiki ke pale aku i nā hopena kemika he nui, e like me nā waikawa a me nā kumu.

Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Na waiwai kino o TaC ka uhi ʻana
密度/ Paʻa	14.3 (g/cm³)
比辐射率 / Emissivity kiko'ī	0.3
热膨胀系数 / Koefisi hoonui wela	6.3 10^-6/K
努氏硬度/ Paʻakiki (HK)	2000 HK
电阻 / Kūʻē	1×10^-5 ʻŌm*cm
热稳定性 / Paʻa wela	<2500 ℃
石墨尺寸变化 / Hoʻololi ka nui o ka graphite	-10~-20um
涂层厚度 / Mānoanoa uhi	≥20um waiwai maʻamau (35um±10um)

ʻO Ningbo VET Energy Technology Co., Ltd he ʻoihana ʻenehana kiʻekiʻe e kālele ana i ka hana ʻana a me ke kūʻai ʻana i nā mea kiʻekiʻe kiʻekiʻe, nā mea hana a me nā ʻenehana e uhi ana i ka graphite, silicon carbide, ceramics, surface treatment and so on.Hoʻohana nui ʻia nā huahana i ka photovoltaic, semiconductor, ikehu hou, metallurgy, etc.

Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.

Hoʻokipa maikaʻi iā ʻoe e kipa i kā mākou hale hana, e kūkākūkā hou kāua!