ʻO VET Energy graphite wafer boat kahi mea hoʻohana kiʻekiʻe i hoʻohālikelike ʻia no nā kaʻina deposition ma semiconductor, photovoltaic a me nā ʻoihana ʻē aʻe. Hana ʻia me ka maʻemaʻe kiʻekiʻe, kiʻekiʻe-density graphite mea, kēia huahana he kiʻekiʻe kiʻekiʻe wela kū'ē, corrosion kū'ē, dimensional paʻa a me nā mea 'ē aʻe, a hiki ke hāʻawi i ka paʻa lawe anuu no ka deposition kaʻina hana e hōʻoia i ka uniformity a me ka flatness o ka thin film deposition .
Hana ʻia ka waʻa graphite PECVD mai VET Energy me ka graphite isostatic maʻemaʻe kiʻekiʻe, e hōʻike ana i ka porosity ma lalo o 15% a me ka roughness ʻili Ra≤1.6μm. ʻO ke kūlana kiʻekiʻe a me ka thermal conductivity e hōʻoia i ka waiho ʻana o ke kiʻiʻoniʻoni like ʻole a me ka hoʻomaikaʻi ʻana i ka pono kelepona.
Mea graphite mai SGL:
Kūlana maʻamau: R6510 | |||
Papa kuhikuhi | Kūlana hoʻāʻo | Waiwai | Unite |
Ka nui o ka palaoa | ISO 13320 | 10 | μm |
ʻAno nui | DIN IEC 60413/204 | 1.83 | g/cm3 |
ʻO ka porosity wehe | DIN66133 | 10 | % |
Ka nui pore waena | DIN66133 | 1.8 | μm |
ʻO ke kūpale | DIN 51935 | 0.06 | knm²/s |
ʻO ka paʻakikī ʻo Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
Kū'ē uila kūikawā | DIN IEC 60413/402 | 13 | μΩm |
Ka ikaika wiliwili | DIN IEC 60413/501 | 60 | MPa |
Ka ikaika compressive | DIN 51910 | 130 | MPa |
Ka modulus opio | DIN 51915 | 11.5×10³ | MPa |
Hoʻonui wela (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
ʻO ke kau wela wela (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Hoʻolālā ʻia ia no ka hana ʻana o nā cell solar kiʻekiʻe, e kākoʻo ana i ka hana wafer nui G12. Hoʻonui nui ka hoʻolālā ʻana i ka mea lawe ʻoi aku ka maikaʻi, e hiki ai ke kiʻekiʻe aʻe nā kumukūʻai a me nā kumukūʻai hana hoʻohaʻahaʻa.
'ikamu | ʻAno | Helu wafer lawe |
ʻO ka moku ʻo PEVCD Grephite - ʻO ka moʻo 156 | 156-13 waapa grephite | 144 |
156-19 waapa grephite | 216 | |
156-21 waapa grephite | 240 | |
156-23 waapa graphite | 308 | |
ʻO ka moku ʻo PEVCD Grephite - ʻO ka moʻo 125 | 125-15 waapa grephite | 196 |
125-19 waʻa grephite | 252 | |
125-21 griphite waapa | 280 |