CVD Silicon Carbide Coated Graphite Ring

ʻO ka wehewehe pōkole:

ʻO VET Energy silicon carbide coated graphite ring he huahana hana kiʻekiʻe i hoʻolālā ʻia e hāʻawi i ka hana kūpaʻa a hilinaʻi i ka manawa lōʻihi. Loaʻa iā ia ke kūpaʻa wela maikaʻi loa a me ka like ʻana o ka wela, ka maʻemaʻe kiʻekiʻe, ka pale ʻana i ka erosion, e hana ana i ka hopena kūpono no nā noi hana wafer.

E hoʻouna i ka leka uila iā mākou Hoʻoiho ma ke ʻano he PDF

Huahana Huahana

Nā ʻano maʻamau o ka Material Graphite Base:

ʻIke ʻia ka mānoanoa:	1.85 g/cm3
Ke kū'ē uila:	11 μΩm
ʻO ke koʻikoʻi ʻoluʻolu:	49 MPa (500kgf/cm2)
Paʻa Paʻa:	58
lehu:	<5ppm
ʻO ka wela wela:	116 W/mK (100 kcal/mhr- ℃)

Hāʻawi mākou i nā ʻano susceptors a me nā ʻāpana graphite no nā reactors epitaxy i kēia manawa. Loaʻa i kā mākou huahana nā mea hoʻopiʻi barela no nā ʻāpana LPE, nā mea hoʻopiʻi pancake no nā ʻāpana LPE, CSD, a me Gemini, a me nā ʻāpana wafer hoʻokahi no nā ʻāpana noi a me ASM.

Ma ka hoʻohui ʻana i nā pilina ikaika me nā OEM alakaʻi, ka ʻike loea a me ka ʻike hana hana, hāʻawi ʻo vet i ka hoʻolālā maikaʻi loa no kāu noi.

ʻO VET Energy ka kamea hana maoli o ka graphite maʻamau a me nā huahana silicon carbide me ka uhi CVD,hiki ke hoolakoʻokoʻanā ʻāpana i hana ʻia no ka semiconductor a me ka ʻoihana photovoltaic. OʻO kāu hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā ʻoihana ʻoihana ʻoi aku ka nuināu.

Fnā ʻano o kā mākou huahana:

1. Kiʻekiʻe wela oxidation kū'ē a hiki i 1700℃.
2. Maʻemaʻe kiʻekiʻe ahoʻolikelike wela
3. ʻOi aku ka maikaʻi o ka corrosion resistance: acid, alkali, paʻakai a me nā mea hoʻohui.
4. ʻO ka paʻakikī kiʻekiʻe, ka ʻili paʻa, nā ʻāpana maikaʻi.
5. ʻOi aku ka lōʻihi o ke ola a ʻoi aku ka lōʻihi

CVD SiC薄膜基本物理性能 Nā waiwai kino kumu o CVD SiCka uhi ʻana
性质 / Waiwai	典型数值 / Waiwai maʻamau
晶体结构 / Hoʻomoe Crystal	Māhele FCC β多晶，主要为（111）取向
密度 / Paʻa	3.21 g/cm³
硬度 / Oolea	2500 维氏硬度（500g load）
晶粒大小 / ʻAiʻa palaoa	2~10μm
纯度 / Maemae Kemika	99.99995%
热容 / Hikina Wela	640 J·kg^-1·K^-1
升华温度 / Kaumaha Sublimation	2700 ℃
抗弯强度 / Ka Ikaika Pilikia	415 MPa RT 4-point
杨氏模量 / 'Ōpio's Modulus	430 Gpa 4pt piko, 1300 ℃
导热系数 / ThermalʻO ka hoʻokō	300W·m^-1·K^-1
热膨胀系数 / Hoʻonui wela (CTE)	4.5×10^-6K^-1