VET Energy silicon carbide (SiC) epitaxial wafer babban aiki ne mai fa'ida mai fa'ida mai ɗaukar hoto tare da kyakkyawan juriya na zafin jiki, mitar mita da manyan halaye masu ƙarfi. Yana da manufa mai mahimmanci don sabon ƙarni na na'urorin lantarki. VET Energy yana amfani da fasahar Epitaxial na MOCVD na ci gaba don haɓaka manyan yadudduka na SiC epitaxial a kan sifofin SiC, yana tabbatar da kyakkyawan aiki da daidaiton wafer.
Mu Silicon Carbide (SiC) Epitaxial Wafer yana ba da kyakkyawar dacewa tare da nau'ikan kayan aikin semiconductor ciki har da Si Wafer, SiC Substrate, SOI Wafer, da SiN Substrate. Tare da ƙaƙƙarfan Layer na epitaxial, yana goyan bayan matakai na ci gaba kamar haɓaka Epi Wafer da haɗin kai tare da kayan kamar Gallium Oxide Ga2O3 da AlN Wafer, yana tabbatar da amfani mai amfani a cikin fasaha daban-daban. An ƙera shi don dacewa da tsarin sarrafa kaset na masana'antu, yana tabbatar da ingantaccen aiki da ingantaccen aiki a cikin mahallin ƙirƙira semiconductor.
Layin samfurin VET Energy baya iyakance ga wafers na SiC epitaxial. Har ila yau, muna samar da nau'o'in nau'i na kayan aiki na semiconductor, ciki har da Si Wafer, SiC Substrate, SOI Wafer, SiN Substrate, Epi Wafer, da dai sauransu. Wafer, don saduwa da buƙatun masana'antar lantarki ta gaba don na'urorin aiki masu girma.
BAYANIN WAFERING
*n-Pm=n-nau'in Pm-Grade,n-Ps=n-nau'in Ps-Grade,Sl=Semi-lnsulating
Abu | 8-inci | 6-Inci | 4-Inci | ||
nP | n-Pm | n-Ps | SI | SI | |
TTV(GBIR) | ≤6 ku | ≤6 ku | |||
Bow(GF3YFCD) - Cikakken Ƙimar | ≤15 μm | ≤15 μm | ≤25μm | ≤15 μm | |
Warp(GF3YFER) | ≤25μm | ≤25μm | ≤40 μm | ≤25μm | |
LTV(SBIR) -10mmx10mm | <2μm | ||||
Wafar Edge | Beveling |
SURFACI GAME
*n-Pm=n-nau'in Pm-Grade,n-Ps=n-nau'in Ps-Grade,Sl=Semi-lnsulating
Abu | 8-inci | 6-Inci | 4-Inci | ||
nP | n-Pm | n-Ps | SI | SI | |
Ƙarshen Sama | Yaren mutanen Poland na gani na gefe biyu, Si- Face CMP | ||||
SurfaceRoughness | (10um x 10um) Si-FaceRa≤0.2nm | (5umx5um) Si-Face Ra≤0.2nm | |||
Kwakwalwa na Edge | Babu Wanda Ya Halatta (tsawo da nisa≥0.5mm) | ||||
Indents | Babu Wanda Ya Halatta | ||||
Scratches (Si-Face) | Qty.≤5, Taruwa | Qty.≤5, Taruwa | Qty.≤5, Taruwa | ||
Karas | Babu Wanda Ya Halatta | ||||
Ƙarƙashin Ƙarfi | 3 mm |