SamfuraDrubutawa
Silicon carbide Wafer Boat ana amfani da ko'ina azaman mariƙin wafer a cikin tsarin yaduwar zafin jiki mai girma.
Amfani:
Babban juriya na zafin jiki:al'ada amfani a 1800 ℃
High thermal watsin:daidai da kayan graphite
Babban taurin:taurin na biyu bayan lu'u-lu'u, boron nitride
Juriya na lalata:acid mai karfi da alkali ba su da lalata gare shi, juriya na lalata ya fi tungsten carbide da alumina kyau.
Hasken nauyi:ƙananan yawa, kusa da aluminum
Babu nakasawa: low coefficient na thermal fadadawa
Thermal girgiza juriya:zai iya jure kaifi canje-canje na zafin jiki, tsayayya da zafin zafi, kuma yana da ingantaccen aiki
Abubuwan Jiki Na SiC
Dukiya | Daraja | Hanya |
Yawan yawa | 3.21 g/c | Nitse-tasowa da girma |
Musamman zafi | 0.66 J/g °K | Filashin Laser mai ƙwanƙwasa |
Ƙarfin sassauƙa | 450 MPa 560 MPa | Lankwasa maki 4, lanƙwasa maki RT4, 1300° |
Karya tauri | 2.94MPa m1/2 | Microindentation |
Tauri | 2800 | Vickers, 500 g na kaya |
Elastic ModulusYoung's Modulus | 450 GPA430 | 4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C |
Girman hatsi | 2-10 m | SEM |
Abubuwan da aka bayar na thermal na SiC
Thermal Conductivity | 250 W/m °K | Hanyar filasha Laser, RT |
Ƙarfafa Ƙarfafawa (CTE) | 4.5 x 10-6 °K | Yanayin zafin jiki zuwa 950 ° C, silica dilatometer |