SiC Wafer Boat/Tower

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SamfuraDrubutawa

Silicon carbide Wafer Boat ana amfani da ko'ina azaman mariƙin wafer a cikin tsarin yaduwar zafin jiki mai girma.

Amfani:

Babban juriya na zafin jiki:al'ada amfani a 1800 ℃

High thermal watsin:daidai da kayan graphite

Babban taurin:taurin na biyu bayan lu'u-lu'u, boron nitride

Juriya na lalata:acid mai karfi da alkali ba su da lalata gare shi, juriya na lalata ya fi tungsten carbide da alumina kyau.

Hasken nauyi:ƙananan yawa, kusa da aluminum

Babu nakasawa: low coefficient na thermal fadadawa

Thermal girgiza juriya:zai iya jure kaifi canje-canje na zafin jiki, tsayayya da zafin zafi, kuma yana da ingantaccen aiki

 

Abubuwan Jiki Na SiC

Dukiya Daraja Hanya
Yawan yawa 3.21 g/c Nitse-tasowa da girma
Musamman zafi 0.66 J/g °K Filashin Laser mai ƙwanƙwasa
Ƙarfin sassauƙa 450 MPa 560 MPa Lankwasa maki 4, lanƙwasa maki RT4, 1300°
Karya tauri 2.94MPa m1/2 Microindentation
Tauri 2800 Vickers, 500 g na kaya
Elastic ModulusYoung's Modulus 450 GPA430 4 pt lanƙwasa, RT4 pt lanƙwasa, 1300 °C
Girman hatsi 2-10 m SEM

 

Abubuwan da aka bayar na thermal na SiC

Thermal Conductivity 250 W/m °K Hanyar filasha Laser, RT
Ƙarfafa Ƙarfafawa (CTE) 4.5 x 10-6 °K Yanayin zafin jiki zuwa 950 ° C, silica dilatometer

 

 

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