CVD Silicon Carbide Rufaffen Zane-zane

CVD Silicon Carbide Mai Rufaffen Zoben Zane-zanen Hoto

Takaitaccen Bayani:

VET Energy silicon carbide mai rufi zoben graphite samfuri ne mai girma wanda aka ƙera don samar da daidaito da ingantaccen aiki na tsawon lokaci. Yana da kyakkyawan juriya na zafi mai kyau da daidaituwa na thermal, babban tsabta, juriya na yashwa, yana mai da shi cikakkiyar bayani don aikace-aikacen sarrafa wafer.

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Tags samfurin

Abubuwan Haɓaka na Kayan Gilashin Gindi:

Yawaita Bayyana:	1.85 g/cm 3
Juriya na Lantarki:	11 μΩm
Ƙarfin Ƙarfi:	49 MPa (500kgf/cm2)
Taurin Teku:	58
Ash:	<5ppm
Ƙarfafa Ƙarfafawa:	116 W/mK (100 kcal/mhr-℃)

Muna ba da nau'ikan susceptors daban-daban da kayan aikin graphite don duk masu haɓakar epitaxy na yanzu. Kayayyakinmu sun haɗa da masu satar ganga don raka'o'in LPE, masu maye gurbin pancake don rukunin LPE, CSD, da Gemini, da masu ɗaukar wafer guda ɗaya don amfani da raka'a ASM.

Ta hanyar haɗa haɗin gwiwa mai ƙarfi tare da manyan OEMs, ƙwararrun kayan aiki da ƙwarewar masana'antu, likitan dabbobi yana ba da mafi kyawun ƙira don aikace-aikacen ku.

Kudin hannun jari VET Energy daainihin manufacturer na musamman graphite da silicon carbide kayayyakin tare da CVD shafi,iya bayarwadaban-dabansassa na musamman don semiconductor da masana'antar hotovoltaic. OƘungiyar fasaha ta ur ta fito ne daga manyan cibiyoyin bincike na gida, za su iya samar da ƙarin ƙwararrun kayan aikina ka.

FAbincin samfuranmu:

1. High zafin jiki oxidation juriya har zuwa 1700℃.
2. Tsafta mai girma dathermal uniformity
3. Excellent lalata juriya: acid, alkali, gishiri da kuma Organic reagents.
4. Babban taurin, m surface, lafiya barbashi.
5. Tsawon rayuwar sabis kuma mafi dorewa

CVD SiC薄膜基本物理性能 Asalin kaddarorin jiki na CVD SiCshafi
性质 / Dukiya	典型数值 / Yawan Daraja
晶体结构 / Tsarin Crystal	FCC β lokaci多晶，主要为（111) 取向
密度 / Yawan yawa	3.21g/cm³
硬度 / Tauri	2500 维氏硬度 (500g kaya)
晶粒大小 / Hatsi SiZe	2 ~ 10 μm
纯度 / Sinadaran Tsabta	99.99995%
热容 / Ƙarfin zafi	640kg^-1· K^-1
升华温度 / Sublimation Zazzabi	2700 ℃
抗弯强度 / Ƙarfin Flexural	415 MPa RT 4-point
杨氏模量 / Matasa Modul	430 Gpa 4pt lankwasa, 1300 ℃
导热系数 / ThermalGudanarwa	300 w·m^-1· K^-1
热膨胀系数 / Fadada thermal (CTE)	4.5×10^-6K^-1