I-Tantalum carbide coated susceptor ye-wafer

Incazelo emfushane:

I-Semicera ingumholi kubuchwepheshe bokuvikela izinga lokushisa eliphezulu futhi siyaziqhenya ngokwethula imikhiqizo yokumboza ye-CVD Tantalum Carbide (TaC) ukuze sikunikeze ukuvikelwa okuthembekile kwezinga lokushisa okuphezulu kwama-graphite substrates akho.I-graphite iyinto enhle kakhulu ekwazi ukumelana nokushisa okuphezulu, kodwa ijwayele ukungena kwi-oxidation emazingeni okushisa aphezulu, angenakugwenywa ngokuphelele ngisho nasesithandweni somlilo.Isembozo sethu se-CVD Tantalum Carbide (TaC) singavimbela ngempumelelo i-oxidation ye-graphite substrate kuyilapho igcina ukusebenza kwayo okuhle kakhulu kwezinga lokushisa eliphezulu.I-TaC futhi iyimpahla engasebenzi engamelana nokusabela ngamagesi afana ne-argon ne-hydrogen.Xhumana ne-Semicera namuhla ukuze ufunde kabanzi mayelana ne-Tantalum Carbide CVD coated EPI susceptors ukuze uqinisekise ukuzinza nokuthembeka kwezicelo zakho zokushisa okuphezulu.

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

I-TaC coating iwuhlobo lwe-tantalum carbide (TaC) elungiselelwe ubuchwepheshe bokubeka umhwamuko ngokomzimba, inezici ezilandelayo:

1. Ubulukhuni obuphezulu: Ukuqina kwe-TaC enamathela kuphezulu, ngokuvamile kungafinyelela ku-2500-3000HV, kuwukunamathela okuhle kakhulu okuqinile.

2. Ukumelana nokugqoka: I-TaC enamathelayo ayigugi kakhulu, enganciphisa ngempumelelo ukuguga nokulimala kwezingxenye eziwumshini ngesikhathi sokusetshenziswa.

3. Ukumelana okuhle kwezinga lokushisa eliphezulu: I-TaC enamathelayo nayo ingagcina ukusebenza kwayo okuhle kakhulu ngaphansi kwemvelo yokushisa ephezulu.

4. Ukuzinza okuhle kwamakhemikhali: I-TaC enamathelayo inokusimama okuhle kwamakhemikhali futhi ingamelana nokusabela kwamakhemikhali okuningi, njengama-asidi nezisekelo.

I-Tantalum Carbide CVD Coating EPI Susceptor_Semicera (1)

碳化钽涂层物理特性物理特性 Izici ezingokomzimba ze I-TaC enamathela
密度/ Ukuminyana	14.3 (g/cm³)
比辐射率 / Ukukhipha umoya okukhethekile	0.3
热膨胀系数 / I-coefficient yokwandisa ukushisa	6.3 10^-6/K
努氏硬度/ Ukuqina (HK)	2000 HK
电阻 / Ukumelana	1×10^-5 Om*cm
热稳定性 / Ukuzinza kwe-thermal	<2500℃
石墨尺寸变化 / Izinguquko zesayizi yegraphite	-10 ~ 20um
涂层厚度 / Ukuqina kwe-coating	≥20um inani elijwayelekile (35um±10um)

I-Ningbo VET Energy Technology Co., Ltd iyibhizinisi lobuchwepheshe obuphezulu eligxile ekukhiqizeni nasekuthengisweni kwezinto ezisezingeni eliphezulu, izinto zokwakha kanye nobuchwepheshe obumboza i-graphite, i-silicon carbide, i-ceramics, ukwelashwa kwendawo nokunye.Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, semiconductor, amandla amasha, i-metallurgy, njll.

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