I-SiC coating coating ofI-graphite substrate yeSemiconductor, i-silicon carbide coating,I-MOCVD Susceptor,
I-Graphite substrate, I-graphite substrate yeSemiconductor, I-MOCVD Susceptor, I-Silicon Carbide Coating,
Izinzuzo ezikhethekile ze-SiC-coated graphite susceptors zihlanganisa ukuhlanzeka okuphezulu kakhulu, ukunamathela okufana nempilo yesevisi enhle kakhulu. Futhi banokuphikiswa okuphezulu kwamakhemikhali kanye nezakhiwo zokuzinza kokushisa.
Ukufakwa kwe-SiCI-graphite substrate yeSemiconductorizinhlelo zokusebenza zikhiqiza ingxenye enobumsulwa obuphakeme nokumelana nomkhathi we-oxidizing.
I-CVD SiC noma i-CVI SiC isetshenziswa kuGraphite yezingxenye zokuklama ezilula noma eziyinkimbinkimbi. Ukumboza kungasetshenziswa ngobukhulu obuhlukahlukene kanye nezingxenye ezinkulu kakhulu.
Izici:
· I-Thermal Shock Resistance enhle kakhulu
· Ukumelana Nokushaqeka Okuhle Kakhulu Komzimba
· Excellent Chemical Resistance
· Super High Purity
· Ukutholakala kokuthi I-Complex Shape
· Isebenziseka ngaphansi kwe-Oxidizing Atmosphere
Izici Ezijwayelekile Ze-Base Graphite Material:
Ukuminyana Okubonakalayo: | 1.85 g/cm3 |
Ukungazweli Kagesi: | 11 μΩm |
I-Flexural Strenth: | 49 MPa (500kgf/cm2) |
Ukuqina Kwasogwini: | 58 |
Umlotha: | <5ppm |
I-Thermal Conductivity: | 116 W/mK (100 kcal/mhr-℃) |
Ikhabhoni ihlinzeka ngezinto ezibamba ukushisa nezingxenye ze-graphite kuzo zonke iziphendulela zamanje ze-epitaxy. Iphothifoliyo yethu ihlanganisa izinto zokususa imigqomo zamayunithi afakiwe kanye ne-LPE, okokufaka amapancake e-LPE, i-CSD, kanye namayunithi e-Gemini, kanye nama-wafer-wafer eyodwa amayunithi asetshenziswayo kanye ne-ASM. inikeza idizayini efanele yohlelo lwakho lokusebenza.
Imikhiqizo eminingi